ʻO Semicera10x10mm Nonpolar M-plane Aluminum Substrateua hoʻolālā maikaʻi ʻia e hoʻokō i nā koi koi o nā noi optoelectronic kiʻekiʻe. Hōʻike kēia substrate i kahi nonpolar M-plane orientation, he mea koʻikoʻi no ka hōʻemi ʻana i nā hopena polarization i nā mea hana e like me nā LED a me nā diodes laser, e alakaʻi ana i ka hoʻomaikaʻi ʻana i ka hana a me ka pono.
ʻO ka10x10mm Nonpolar M-plane Aluminum Substratehana ʻia me ka maikaʻi crystalline maikaʻi loa, e hōʻoiaʻiʻo ana i ka liʻiliʻi liʻiliʻi o nā hemahema a me ka paʻa o ke kūkulu ʻana. ʻO kēia ke koho maikaʻi loa no ka ulu ʻana o ka epitaxial o nā kiʻiʻoniʻoni III-nitride kiʻekiʻe, he mea nui ia no ka hoʻomohala ʻana i nā mea hana optoelectronic e hiki mai ana.
ʻO Semicera's precision engineering e hōʻoia i kēlā me kēia10x10mm Nonpolar M-plane Aluminum Substratehāʻawi i ka mānoanoa like ʻole a me ka palahalaha o ka ʻili, he mea koʻikoʻi no ka waiho ʻana o nā kiʻiʻoniʻoni like ʻole a me ka hana ʻana i nā mea hana. Hoʻohui ʻia, ʻo ka nui paʻa o ka substrate e kūpono ia no ka noiʻi a me nā kaiapuni hana, e ʻae ai i ka hoʻohana maʻalahi i nā ʻano noi. Me kona kūpaʻa wela a me ke kemika maikaʻi loa, hāʻawi kēia substrate i kumu hilinaʻi no ka hoʻomohala ʻana i nā ʻenehana optoelectronic ʻokiʻoki.
| Nā mea | Paahana | Ka noiʻi | Dummy |
| Nā Kūlana Crystal | |||
| Polytype | 4H | ||
| Ua hewa ka hoʻonohonoho ʻana o ka ʻili | <11-20 >4±0.15° | ||
| Nā Kūlana Uila | |||
| Dopant | n-ʻano Nitrogen | ||
| Kū'ē | 0.015-0.025ohm·cm | ||
| Nā Kūlana Mechanical | |||
| Anawaena | 150.0±0.2mm | ||
| mānoanoa | 350±25 μm | ||
| Kūlana pālahalaha mua | [1-100]±5° | ||
| Ka lōʻihi pālahalaha mua | 47.5±1.5mm | ||
| palahalaha lua | ʻAʻohe | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| Kakaka | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤35 μm | ≤45 μm | ≤55 μm |
| 'Oka (AFM) mua (Si-maka) | Ra≤0.2nm (5μm*5μm) | ||
| Hoʻolālā | |||
| Micropipe mānoanoa | <1 ea/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Metala haumia | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| ʻAno o mua | |||
| Imua | Si | ||
| Hoʻopau ʻili | Si-maka CMP | ||
| Nā ʻāpana | ≤60ea/wafer (nui≥0.3μm) | NA | |
| Nā ʻōpala | ≤5ea/mm. Ka lōʻihi huila ≤Diameter | ʻO ka lōʻihi huila≤2*Diameter | NA |
| ʻAlani ʻili/mau lua/ʻeleʻele/striations/ māwae/contamination | ʻAʻohe | NA | |
| Nā ʻāpana lihi/indents/fracture/papa hex | ʻAʻohe | ||
| Nā wahi polytype | ʻAʻohe | ʻĀpana huila≤20% | ʻĀpana huila≤30% |
| Hōʻailona laser mua | ʻAʻohe | ||
| ʻAno o hope | |||
| Hoʻopau hope | C-maka CMP | ||
| Nā ʻōpala | ≤5ea / mm, Ka lōʻihi huila≤2 * Anawaena | NA | |
| Nā hemahema o hope (nā ʻāpana lihi/indents) | ʻAʻohe | ||
| ʻōkalakala kua | Ra≤0.2nm (5μm*5μm) | ||
| Hōʻailona laser hope | 1 mm (mai ka lihi luna) | ||
| Kaulana | |||
| Kaulana | Chamfer | ||
| Hoʻopili ʻia | |||
| Hoʻopili ʻia | Epi-mākaukau me ka hoʻopaʻa ʻumeke Puke cassette nui-wafer | ||
| *Nā memo: "NA" ʻo ia hoʻi, ʻaʻohe noi ʻO nā mea i ʻōlelo ʻole ʻia e pili ana i SEMI-STD. | |||
