ʻO Semicera's 4"6" High Purity Semi-Insulating SiC Ingots i hoʻolālā ʻia e hoʻokō i nā kūlana kūpono o ka ʻoihana semiconductor. Hana ʻia kēia mau ingots me ka nānā ʻana i ka maʻemaʻe a me ke kūpaʻa, e hoʻolilo iā lākou i koho maikaʻi loa no nā noi kiʻekiʻe a me nā alapine kiʻekiʻe kahi mea nui ka hana.
ʻO nā waiwai kūʻokoʻa o kēia mau SiC ingots, me ka conductivity thermal kiʻekiʻe a me ka resistivity uila maikaʻi loa, e kūpono iā lākou no ka hoʻohana ʻana i nā uila uila a me nā polokalamu microwave. ʻO kā lākou ʻano semi-insulating hiki ke hoʻopau i ka wela a me ka liʻiliʻi o ka uila uila, e alakaʻi ana i nā ʻāpana ʻoi aku ka maikaʻi a hilinaʻi.
Hoʻohana ʻo Semicera i nā kaʻina hana hou no ka hana ʻana i nā ingots me ka maikaʻi o ke aniani a me ke kūlike. Hōʻoia kēia kikoʻī e hiki ke hoʻohana pono ʻia kēlā me kēia ingot i nā noi koʻikoʻi, e like me nā amplifier kiʻekiʻe-frequency, laser diodes, a me nā mea hana optoelectronic ʻē aʻe.
Loaʻa i ka nui 4-inch a me 6-inch, Semicera's SiC ingots e hāʻawi i ka maʻalahi e pono ai no nā unahi hana like ʻole a me nā koi ʻenehana. Inā no ka noiʻi a me ka hoʻomohala ʻana a i ʻole ka hana nui, hāʻawi kēia mau ingots i ka hana a me ka lōʻihi i koi ʻia e nā ʻōnaehana uila hou.
Ma ke koho ʻana i ka High Purity Semi-Insulating SiC Ingots o Semicera, ke hoʻopukapuka nei ʻoe i kahi huahana e hoʻohui i ka ʻepekema waiwai kiʻekiʻe me ka ʻike hana hana like ʻole. Hoʻolaʻa ʻia ʻo Semicera i ke kākoʻo ʻana i ka hana hou a me ka ulu ʻana o ka ʻoihana semiconductor, e hāʻawi ana i nā mea e hiki ai i ka hoʻomohala ʻana i nā mea uila uila.
Nā mea | Paahana | Ka noiʻi | Dummy |
Nā Kūlana Crystal | |||
Polytype | 4H | ||
Ua hewa ka hoʻonohonoho ʻana o ka ʻili | <11-20 >4±0.15° | ||
Nā Kūlana Uila | |||
Dopant | n-ʻano Nitrogen | ||
Kū'ē | 0.015-0.025ohm·cm | ||
Nā Kūlana Mechanical | |||
Anawaena | 150.0±0.2mm | ||
mānoanoa | 350±25 μm | ||
Kūlana pālahalaha mua | [1-100]±5° | ||
Ka lōʻihi pālahalaha mua | 47.5±1.5mm | ||
palahalaha lua | ʻAʻohe | ||
TTV | ≤5 μm | ≤10 μm | ≤15 μm |
LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
Kakaka | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
Warp | ≤35 μm | ≤45 μm | ≤55 μm |
'Oka (AFM) mua (Si-maka) | Ra≤0.2nm (5μm*5μm) | ||
Hoʻolālā | |||
Micropipe mānoanoa | <1 ea/cm2 | <10 ea/cm2 | <15 ea/cm2 |
Metala haumia | ≤5E10atoms/cm2 | NA | |
BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
ʻAno o mua | |||
Imua | Si | ||
Hoʻopau ʻili | Si-maka CMP | ||
Nā ʻāpana | ≤60ea/wafer (nui≥0.3μm) | NA | |
Nā ʻōpala | ≤5ea/mm. Ka lōʻihi huila ≤Diameter | ʻO ka lōʻihi huila≤2*Diameter | NA |
ʻAlani ʻili/mau lua/ʻeleʻele/striations/ māwae/contamination | ʻAʻohe | NA | |
Nā ʻāpana lihi/indents/fracture/papa hex | ʻAʻohe | ||
Nā wahi polytype | ʻAʻohe | ʻĀpana huila≤20% | ʻĀpana huila≤30% |
Hōʻailona laser mua | ʻAʻohe | ||
ʻAno o hope | |||
Hoʻopau hope | C-maka CMP | ||
Nā ʻōpala | ≤5ea / mm, Ka lōʻihi huila≤2 * Anawaena | NA | |
Nā pōʻino hope (nā ʻāpana lihi/indents) | ʻAʻohe | ||
ʻōkalakala kua | Ra≤0.2nm (5μm*5μm) | ||
Hōʻailona laser hope | 1 mm (mai ka lihi luna) | ||
Kaulana | |||
Kaulana | Chamfer | ||
Hoʻopili ʻia | |||
Hoʻopili ʻia | Epi-mākaukau me ka hoʻopaʻa ʻumeke Puke cassette nui-wafer | ||
*Nā memo: "NA" ʻo ia hoʻi, ʻaʻohe noi ʻO nā mea i ʻōlelo ʻole ʻia e pili ana i SEMI-STD. |