ʻO Silicon carbide (SiC) hoʻokahi kristal mea i loaʻa i kahi ākea ākea nui (~ Si 3 mau manawa), kiʻekiʻe thermal conductivity (~ Si 3.3 mau manawa a i ʻole GaAs 10 manawa), kiʻekiʻe electron saturation migration rate (~ Si 2.5 mau manawa), kiʻekiʻe breakdown uila. kahua (~ Si 10 manawa a i ʻole GaAs 5 manawa) a me nā hiʻohiʻona ʻē aʻe.
ʻO ke kolu o ka hanauna semiconductor waiwai ka nui o ka SiC, GaN, daimana, a me nā mea ʻē aʻe, no ka mea, ʻoi aku ka nui o kona ākea ākea (Eg) ma mua a i ʻole like me 2.3 electron volts (eV), ʻike ʻia hoʻi he mau mea semiconductor ākea band gap. Ke hoʻohālikelike ʻia me nā mea semiconductor o ka hanauna mua a me ka lua, ʻo ke kolu o ka hanauna semiconductor nā mea maikaʻi o ke kiʻekiʻe thermal conductivity, kiʻekiʻe breakdown uila kahua, kiʻekiʻe saturated electron migration rate a me ka ikaika hoʻopaʻa kiʻekiʻe, hiki ke hoʻokō i nā koi hou o ka ʻenehana uila hou no ke kiʻekiʻe. ka mahana, ka mana kiʻekiʻe, ke kaomi kiʻekiʻe, ke alapine kiʻekiʻe a me ka pale ʻana i ka radiation a me nā kūlana koʻikoʻi ʻē aʻe. Loaʻa iā ia nā manaʻo noiʻi koʻikoʻi ma nā kahua o ka pale aupuni, ka mokulele, ka aerospace, ka ʻimi ʻaila, ka mālama ʻana i ka optical, a me nā mea ʻē aʻe, a hiki ke hōʻemi i ka nalowale o ka ikehu ma mua o 50% i nā ʻoihana hoʻolālā he nui e like me ke kamaʻilio broadband, ikehu lā, hana kaʻa, ʻO nā kukui semiconductor, a me ka mākaʻikaʻi akamai, a hiki ke hōʻemi i ka nui o nā mea hana ma mua o 75%, he mea nui ia no ka hoʻomohala ʻana i ka ʻepekema kanaka a me ka ʻenehana.
Hiki i ka ikaika Semicera ke hāʻawi aku i nā mea kūʻai aku me ke kūlana kiʻekiʻe Conductive (Conductive), Semi-insulating (Semi-insulating), HPSI (High Purity semi-insulating) silicon carbide substrate; Eia hou, hiki iā mākou ke hāʻawi aku i nā mea kūʻai aku me nā pepa epitaxial silicon carbide homogeneous a heterogeneous; Hiki iā mākou ke hoʻopilikino i ka pepa epitaxial e like me nā pono kikoʻī o nā mea kūʻai aku, a ʻaʻohe palena liʻiliʻi.
NUI HUA HUA NUI
Nui | 6-iniha |
Anawaena | 150.0mm+0mm/-0.2mm |
Kūlana ʻili | off-axis: 4° i ka<1120>±0.5° |
Ka lōʻihi pālahalaha | 47.5mm1.5 mm |
Kūlana Pāha mua | <1120>±1.0° |
Pāpā lua | ʻAʻohe |
mānoanoa | 350.0um±25.0um |
Polytype | 4H |
ʻAno Conductive | n-ʻano |
NĀ HOʻOPIʻI KIKAIKA
6-iniha | ||
'ikamu | Papa P-MOS | Papa P-SBD |
Kū'ē | 0.015Ω·cm-0.025Ω·cm | |
Polytype | ʻAʻole ʻae ʻia | |
Micropipe Density | ≤0.2/cm2 | ≤0.5/cm2 |
EPD | ≤4000/cm2 | ≤8000/cm2 |
TED | ≤3000/cm2 | ≤6000/cm2 |
BPD | ≤1000/cm2 | ≤2000/cm2 |
TSD | ≤300/cm2 | ≤1000/cm2 |
SF(Ana ʻia e ka UV-PL-355nm) | ≤0.5% wahi | ≤1% ʻāpana |
Nā papa Hex ma ke kukui ikaika kiʻekiʻe | ʻAʻole ʻae ʻia | |
ʻIke ʻia CarbonInclusions e ke kukui ikaika kiʻekiʻe | ʻĀpana hui≤0.05% |