Hoʻolālā ʻia ka 6'' Wafer Carrier no Aixtron G5 e Semicera e hoʻokō i nā koi koi o nā kaʻina ulu epitaxial i nā ʻōnaehana Aixtron G5. Kūkulu ʻia me ka graphite kiʻekiʻe, kēialawe waferhōʻoia i ka paʻa a me ka lokahi i ka wā o kaCVDaNā hana MOCVD, hiki ke waiho pololei i ka epi reactor.
Me asilika carbide keramikaka uhi ʻana, ʻo ka 6'' Wafer Carrier no Aixtron G5 e hāʻawi i ka hoʻonui ʻia a me ke kūpaʻa wela, e kūpono ana i nā noi wela kiʻekiʻe i ka ulu epitaxial. Hoʻolālā ʻia kēia huahana e kākoʻo i ka ponowaferlawelawe a hoʻonui i ka hana i ka hana semiconductor.
Ma Semicera, nānā mākou i ka hāʻawi ʻana i nā ʻōnaehana kiʻekiʻe no ka ʻoihana semiconductor. Kūkulu ʻia kā mākou mau mea lawe wafer no ka hilinaʻi, e hōʻoiaʻiʻo ana i ka hana maʻalahi i nā ʻōnaehana Aixtron G5 a me nā mea ʻē aʻeCVD epitaxyreactors. Inā ʻoe e hana pū ana me ka silicon carbide a i ʻole nā mea ʻē aʻe, e hōʻoia kēia mea lawe wafer i ka pololei a me ke kūlike e pono ai no ka hana semiconductor holomua.
Nā mea nui:
• Hoʻonui ʻia no nā ʻōnaehana Aixtron G5 a me nā mea hoʻoheheʻe CVD MOCVD ʻē aʻe.
• Kiʻekiʻe kiʻekiʻe graphite susceptor me ka silicon carbide seramika uhi no ka hoʻonui lōʻihi.
• He kūpono no nā kaʻina ulu epitaxial e koi ana i ka pololei a me ke kūpaʻa wela.
• ʻO ka lawelawe ʻana i ka wafer hilinaʻi ma nā kaiapuni semiconductor paʻakikī.
Hoʻolaʻa ʻia ʻo Semicera i ka hāʻawi ʻana i nā hopena ʻokiʻoki, e hōʻoia i kēlā me kēia 6'' Wafer Carrier e hoʻokō i nā kūlana kiʻekiʻe loa no kāu epitaxy pono.