ʻO Semicera's 8 Inch N-type SiC Wafers ma ke alo o ka hana hou semiconductor, e hāʻawi ana i kahi kumu paʻa no ka hoʻomohala ʻana i nā mea uila kiʻekiʻe. Hoʻolālā ʻia kēia mau wafers e hoʻokō i nā koi koʻikoʻi o nā noi uila o kēia wā, mai ka uila uila a hiki i nā kaapuni kiʻekiʻe.
Hoʻonui ka doping N-type i kēia mau wafers SiC i kā lākou conductivity uila, e hoʻolilo iā lākou i mea kūpono no kahi ākea o nā noi, me nā mana diodes, transistors, a me nā mea hoʻonui. ʻO ka conductivity kiʻekiʻe e hōʻoia i ka liʻiliʻi o ka nalowale o ka ikehu a me ka hana maikaʻi, he mea koʻikoʻi ia no nā polokalamu e hana ana i nā alapine kiʻekiʻe a me nā pae mana.
Hoʻohana ʻo Semicera i nā ʻenehana hana kiʻekiʻe e hana i nā wafers SiC me ka like ʻole o ka ʻili a me nā hemahema liʻiliʻi. Pono kēia pae o ka pololei no nā noi e koi ana i ka hana mau a me ka lōʻihi, e like me ka aerospace, automotive, a me nā ʻoihana kelepona.
ʻO ka hoʻokomo ʻana i kā Semicera's 8 Inch N-type SiC Wafers i kāu laina hana e hāʻawi i kumu no ka hana ʻana i nā ʻāpana hiki ke kū i nā kaiapuni paʻakikī a me nā wela kiʻekiʻe. He kūpono kēia mau wafers no nā noi i ka hoʻololi ʻana i ka mana, ʻenehana RF, a me nā māla koi ʻē aʻe.
Ke koho ʻana i kā Semicera's 8 Inch N-type SiC Wafers ʻo ia hoʻi ka hoʻokomo ʻana i kahi huahana e hoʻohui i ka ʻepekema waiwai kiʻekiʻe me ka ʻenekinia pololei. Ua kūpaʻa ʻo Semicera i ka holomua ʻana i nā mana o nā ʻenehana semiconductor, e hāʻawi ana i nā hāʻina e hoʻonui ai i ka pono a me ka hilinaʻi o kāu mau mea uila.
Nā mea | Paahana | Ka noiʻi | Dummy |
Nā Kūlana Crystal | |||
Polytype | 4H | ||
Ua hewa ka hoʻonohonoho ʻana o ka ʻili | <11-20 >4±0.15° | ||
Nā Kūlana Uila | |||
Dopant | n-ʻano Nitrogen | ||
Kū'ē | 0.015-0.025ohm·cm | ||
Nā Kūlana Mechanical | |||
Anawaena | 150.0±0.2mm | ||
mānoanoa | 350±25 μm | ||
Kūlana pālahalaha mua | [1-100]±5° | ||
Ka lōʻihi pālahalaha mua | 47.5±1.5mm | ||
palahalaha lua | ʻAʻohe | ||
TTV | ≤5 μm | ≤10 μm | ≤15 μm |
LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
Kakaka | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
Warp | ≤35 μm | ≤45 μm | ≤55 μm |
'Oka (AFM) mua (Si-maka) | Ra≤0.2nm (5μm*5μm) | ||
Hoʻolālā | |||
Micropipe mānoanoa | <1 ea/cm2 | <10 ea/cm2 | <15 ea/cm2 |
Metala haumia | ≤5E10atoms/cm2 | NA | |
BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
ʻAno o mua | |||
Imua | Si | ||
Hoʻopau ʻili | Si-maka CMP | ||
Nā ʻāpana | ≤60ea/wafer (nui≥0.3μm) | NA | |
Nā ʻōpala | ≤5ea/mm. Ka lōʻihi huila ≤Diameter | ʻO ka lōʻihi huila≤2*Diameter | NA |
ʻAlani ʻili/mau lua/ʻeleʻele/striations/ māwae/contamination | ʻAʻohe | NA | |
Nā ʻāpana lihi/indents/fracture/papa hex | ʻAʻohe | ||
Nā wahi polytype | ʻAʻohe | ʻĀpana huila≤20% | ʻĀpana huila≤30% |
Hōʻailona laser mua | ʻAʻohe | ||
ʻAno o hope | |||
Hoʻopau hope | C-maka CMP | ||
Nā ʻōpala | ≤5ea / mm, Ka lōʻihi huila≤2 * Anawaena | NA | |
Nā pōʻino hope (nā ʻāpana lihi/indents) | ʻAʻohe | ||
ʻōkalakala kua | Ra≤0.2nm (5μm*5μm) | ||
Hōʻailona laser hope | 1 mm (mai ka lihi luna) | ||
Kaulana | |||
Kaulana | Chamfer | ||
Hoʻopili ʻia | |||
Hoʻopili ʻia | Epi-mākaukau me ka hoʻopaʻa ʻumeke Puke cassette nui-wafer | ||
*Nā memo: "NA" ʻo ia hoʻi, ʻaʻohe noi ʻO nā mea i ʻōlelo ʻole ʻia e pili ana i SEMI-STD. |