ʻO ka AlN Heater e semicera kahi hopena hoʻomehana holomua i hana ʻia mai ka alumini nitride ceramic, i hoʻolālā ʻia no nā noi hana kiʻekiʻe ma nā ʻoihana e like me nā semiconductors, nā ʻōnaehana vacuum, a me nā mea hou aku. ʻO kēia mea hoʻomehana wela a me ka insulation uila e kūpono ia no ka hoʻomehana pololei i nā wahi koi e like me ka hana wafer, nā evaporators vacuum, a me nā mīkini sputtering.
Ma semicera, haʻaheo mākou iā mākou iho i ka hāʻawi ʻana i nā huahana kiʻekiʻe e kū ana i nā pono o ka ʻoihana, a ʻaʻole ʻokoʻa ka AlN Heater. Hana ʻia mai ka alumini nitride (AlN), hāʻawi kēia mea hoʻomehana i ka pale wela maikaʻi loa, ka hoʻonui haʻahaʻa haʻahaʻa, a me ka hiki ke kū i nā wela wela me ka ʻole o ka hoʻokō ʻana i ka hana. ʻO ka hāʻawi ʻana i ka wela maikaʻi e kūpono ia no nā kaʻina hana koʻikoʻi e like me ka chemical vapor deposition (CVD) a me nā noi kiʻiʻoniʻoni lahilahi.
Hoʻohui hou, kūpono ka AlN Heater no ka hoʻohui ʻana i nā mea hoʻomehana wafer a me nā evaporators vacuum, e hana ia i mea hoʻonā maʻalahi no nā mea hana e hilinaʻi nei i nā mea hoʻomehana kiʻekiʻe. Me ka alumini nitride machining a me ka precision nitride o ka hana alumini, ua kūkulu ʻia ka mea hoʻomehana no ka hilinaʻi lōʻihi a me ka mana hoʻomehana pololei.
Inā ʻoe e ʻimi nei i kahi AlN alumini nitride solution i ʻoi aku ka maikaʻi ma ka lōʻihi a me ka pono, hāʻawi ʻo semicera i kahi koho hilinaʻi i ka AlN Heater. Ke kākoʻo nei kēia mea hoʻomehana ceramic kiʻekiʻe i nā ʻenehana ʻokiʻoki i nā kaʻina CVD, sputtering, a me nā noi semiconductor ʻē aʻe, e kōkua ana i ka mālama pono ʻana i ke kaʻina hana ma nā wahi wela kiʻekiʻe.
