Hāʻawi ʻo Blue/green LED epitaxy mai semicera i nā hopena ʻokiʻoki no ka hana ʻana o LED kiʻekiʻe. Hoʻolālā ʻia e kākoʻo i nā kaʻina ulu epitaxial holomua, hoʻonui ka ʻenehana epitaxy Blue/green LED epitaxy semicera i ka pono a me ka pololei i ka hana ʻana i nā LED uliuli a me ka ʻōmaʻomaʻo, koʻikoʻi no nā noi optoelectronic like ʻole. Ke hoʻohana nei i ka Si Epitaxy a me SiC Epitaxy, ʻo kēia hoʻonā e hōʻoia i ka maikaʻi a me ka lōʻihi.
I ke kaʻina hana, he kuleana koʻikoʻi ka MOCVD Susceptor, me nā ʻāpana e like me PSS Etching Carrier, ICP Etching Carrier, a me RTP Carrier, nāna e hoʻonui i ka ulu ulu epitaxial. Hoʻolālā ʻia ʻo Semicera's Blue/green LED epitaxy e hāʻawi i ke kākoʻo paʻa no ka LED Epitaxial Susceptor, Barrel Susceptor, a me Monocrystalline Silicon, e hōʻoiaʻiʻo ana i ka hana ʻana i nā hopena kiʻekiʻe.
He mea koʻikoʻi kēia kaʻina hana epitaxy no ka hana ʻana i nā ʻāpana Photovoltaic a kākoʻo i nā noi e like me GaN ma SiC Epitaxy, e hoʻomaikaʻi ana i ka pono semiconductor holoʻokoʻa. Inā i loko o kahi hoʻonohonoho Pancake Susceptor a i hoʻohana ʻia i nā hoʻonohonoho holomua ʻē aʻe, hāʻawi nā semicera's Blue/green LED epitaxy solutions i ka hana hilinaʻi, e kōkua ana i nā mea hana e hoʻokō i ka koi ulu no nā ʻāpana LED kiʻekiʻe.
Nā hiʻohiʻona nui:
1. Kiʻekiʻe wela oxidation kū'ē:
ʻoi aku ka maikaʻi o ka pale ʻana i ka oxidation ke kiʻekiʻe ka mahana e like me 1600 C.
2. Maʻemaʻe kiʻekiʻe: hana ʻia e ka hoʻoheheʻe ʻana i ka mahu ma lalo o ke kūlana chlorination kiʻekiʻe.
3. Erosion kū'ē: kiʻekiʻe paakiki, paʻaʻiliʻili, maikaʻi particles.
4. Ke kū'ē i ka corrosion: acid, alkali, paʻakai a me nā mea hoʻoulu.
Nā kikoʻī nui oKa uhi ʻana o CVD-SIC
| Nā Waiwai SiC-CVD | ||
| Hoʻokumu Crystal | Māhele FCC β | |
| ʻO ka mānoanoa | g/cm ³ | 3.21 |
| ʻoʻoleʻa | ʻO ka paʻakikī o Vickers | 2500 |
| Ka nui o ka palaoa | μm | 2~10 |
| Maemae Kemika | % | 99.99995 |
| Kaha Wela | J·kg-1 ·K-1 | 640 |
| Mahana Sublimation | ℃ | 2700 |
| Ikaika Felexural | MPa (RT 4-point) | 415 |
| ʻO Young's Modulus | Gpa (4pt piko, 1300 ℃) | 430 |
| Hoʻonui wela (CTE) | 10-6K-1 | 4.5 |
| ʻO ke kau wela wela | (W/mK) | 300 |
