RTPNā apo CVD SiChoʻohana nui ʻia i nā ʻoihana ʻenehana a me nā ʻepekema i ke kiʻekiʻe wela a me nā wahi corrosive. He hana koʻikoʻi ia i ka hana semiconductor, optoelectronics, mīkini pololei a me ka ʻoihana kemika. Loaʻa nā noi kikoʻī:
1. Hana semiconductor:RTP CVD SiC apohiki ke hoʻohanaʻia no ka hoʻomehanaʻana a me ka hoʻomahaʻana o nā mea semiconductor, e hāʻawi ana i ka mana mahana paʻa a me ka hōʻoiaʻana i ka pololei a me ke kūlike o ke kaʻina hana.
2. Optoelectronics: Ma muli o ka maikaʻi loa o ka wela wela a me ke kūpaʻa wela kiʻekiʻe, RTPNā apo CVD SiChiki ke hoʻohana ʻia e like me ke kākoʻo a me nā mea hoʻopau wela no nā lasers, nā lako kamaʻilio fiber optic a me nā ʻāpana optical.
3. Mīkini pololei: Hiki ke hoʻohana ʻia nā apo RTP CVD SiC no nā mea kani pololei a me nā mea hana i ke kiʻekiʻe wela a me nā wahi corrosive, e like me nā umu wela kiʻekiʻe, nā mea hoʻoheheʻe a me nā reactors kemika.
4. ʻOihana Kemika: Ma muli o kona kūpaʻa ʻana i ka corrosion a me ke kūpaʻa kemika, hiki ke hoʻohana ʻia nā apo RTP CVD SiC i loko o nā ipu, nā paipu a me nā reactors i nā hopena kemika a me nā kaʻina catalytic.
Pūnaehana Epi
Pūnaehana RTP
Pūnaehana CVD
Hana huahana:
1. E hālāwai me ke kaʻina hana ma lalo o 28nm
2. Super corrosion kū'ē
3. Hana maʻemaʻe loa
4. Paʻa loa
5. Kiʻekiʻe kiʻekiʻe
6. Kūleʻa wela kiʻekiʻe
7. E komo i ke kū'ē
noi huahana:
Loaʻa i nā mea Silicon carbide nā hiʻohiʻona o ka paʻakikī kiʻekiʻe, ke kūpaʻa aahu, ke kūpaʻa corrosion a me ke kūpaʻa wela kiʻekiʻe. Hoʻohana nui ʻia nā huahana me ka hana piha maikaʻi loa i ka etching maloʻo a me nā kaʻina hana TF/Diffusion.
Hana huahana:
1. E hālāwai me ke kaʻina hana ma lalo o 28nm
2. Super corrosion kū'ē
3. Hana maʻemaʻe loa
4. Paʻa loa
5. Kiʻekiʻe kiʻekiʻe
6. Kūleʻa wela kiʻekiʻe
7. E komo i ke kū'ē
Kūkulu kaʻina hana hui:
ʻO ka graphite +Sic ka uhi
Solide CvD sic
Hoʻopili ʻia ʻo SiC+CVD
SicSintered SiC
Hoʻomohala ʻano huahana lehulehu:
apo
Papakaukau
Mea kūʻai
Poo Ua
