ʻO ka CVD SiC Etching Ring mai Semicera, kahi hopena mua i hoʻolālā ʻia no nā kaʻina hana semiconductor holomua. Hana ʻia kā mākou mau apo etching e hoʻomaikaʻi i ka hana o nā poʻo ʻauʻau CVD SiC, e hōʻoiaʻiʻo ana i nā hopena maikaʻi loa i ka wā o ka diffusion. Me kā lākou hana paʻa a me ka ʻenehana pololei, hāʻawi kēia mau apo i ka hilinaʻi a me ka pono e pono ai no nā noi etch maloʻo kiʻekiʻe.
Ma Semicera, hoʻomaopopo mākou i ka hana koʻikoʻi o ka silicon carbide i ka ʻenehana semiconductor. Hoʻonohonoho pono ʻia kā mākou mau apo etching CVD SiC e hoʻokō i nā kaʻina hana like ʻole, me ka MOCVD a me nā ʻenehana etching ʻē aʻe. Hoʻopaʻa ʻia ka paʻa SiC paʻa i ke kūpaʻa wela maikaʻi loa a me ke kūpaʻa kemika, e hana ana i kā mākou mau apo etching i koho maikaʻi loa no nā kaiapuni koʻikoʻi loa.
ʻO kā mākou kūpaʻa i ka hana hou a me ka maikaʻi e hōʻoia i kēlā me kēia CVD SiC etching ring e hoʻokō i nā kūlana ʻoihana kiʻekiʻe loa. E koho iā Semicera no kāu mau hoʻonā etching a ʻike i ka hana like ʻole a me ka lōʻihi i kūpono i kāu mau pono kūikawā. Me ko makou akamai i ka SiC showerheads a me ka etching technology, eia makou e kākoʻo i kou holomua ma ka semiconductor field.
Ma ke kahua semiconductor, he mea koʻikoʻi ka paʻa o kēlā me kēia ʻāpana no ke kaʻina holoʻokoʻa. Eia nō naʻe, i loko o kahi kaiapuni kiʻekiʻe, ua maʻalahi ka graphite a nalowale, a hiki i ka uhi SiC ke hāʻawi i ka pale paʻa no nā ʻāpana graphite. I kaSemicerahui, loaʻa iā mākou kā mākou pono hana hoʻomaʻemaʻe graphite, hiki ke hoʻomalu i ka maʻemaʻe o ka graphite ma lalo o 5ppm. ʻO ka maʻemaʻe o ka uhi kalapona silika ma lalo o 5ppm.
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