NānāCVD SiC apohe mea apo silikona carbide (SiC) i hoʻomākaukau ʻia e ka ʻenehana Focus Chemical Vapor Deposition (Focus CVD).
NānāCVD SiC apoloaʻa nā hiʻohiʻona hana maikaʻi loa. ʻO ka mea mua, loaʻa ka paʻakikī kiʻekiʻe, ka helu heheʻe kiʻekiʻe a me ke kūpaʻa kiʻekiʻe kiʻekiʻe, a hiki ke mālama i ka paʻa a me ka pololei o ka hale ma lalo o nā kūlana wela. ʻO ka lua, ʻo FocusCVD SiC apoHe kūpaʻa kemika maikaʻi loa a me ka pale ʻana i ka corrosion, a he kūʻē kiʻekiʻe i ka media corrosive e like me nā waikawa a me nā alkalis. Eia kekahi, loaʻa iā ia ka conductivity thermal maikaʻi loa a me ka ikaika mechanical, i kūpono i nā koi noi i ke kiʻekiʻe wela, ke kiʻekiʻe kiʻekiʻe a me nā wahi corrosive.
NānāCVD SiC apohoʻohana nui ʻia ma nā ʻano he nui. Hoʻohana pinepine ʻia ia no ka hoʻokaʻawale ʻana i ka wela a me nā mea pale o nā mea wela wela, e like me nā umu wela wela, nā mea hoʻokalakupua a me nā reactors kemika. Eia kekahi, FocusCVD SiC apohiki ke hoʻohana ʻia i ka optoelectronics, semiconductor manufacturing, precision machinery a me aerospace, e hāʻawi ana i ka hoʻomanawanui ʻana i ke kaiapuni kiʻekiʻe a me ka hilinaʻi.
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Epitaxy Growth Susceptor
Pono nā wafers silicon/silicon carbide e hele i nā kaʻina hana e hoʻohana ʻia i nā mea uila. ʻO ke kaʻina hana nui he silicon/sic epitaxy, kahi e lawe ʻia ai nā wafer silicon/sic ma kahi kumu graphite. ʻO nā pōmaikaʻi kūikawā o ke kumu graphite i uhi ʻia i ka silicon carbide a Semicera, ʻo ia ka maʻemaʻe kiʻekiʻe loa, ka uhi ʻaʻahu, a me ke ola lawelawe lōʻihi loa. Loaʻa iā lākou ke kūpaʻa kemika kiʻekiʻe a me ke kūpaʻa wela.
Hoʻokumu ʻia ʻo LED Chip
I loko o ka uhi nui o ka MOCVD reactor, hoʻoneʻe ke kumu honua a mea lawe i ka wafer substrate. ʻO ka hana o ka mea kumu he mana nui i ka maikaʻi o ka uhi ʻana, a laila e hoʻopili i ka helu ʻōpala o ka chip. Hoʻonui ke kumu i hoʻopaʻa ʻia i ka carbide silicon a Semicera i ka hana ʻana o nā wafers LED kiʻekiʻe a hoʻemi i ka haʻalele ʻana o ka nalu. Hāʻawi pū mākou i nā ʻāpana graphite hou no nā reactor MOCVD a pau e hoʻohana ʻia nei. Hiki iā mākou ke kāhiko i nā mea a pau me ka uhi silicon carbide, ʻoiai inā ʻoi aku ke anawaena o ka ʻāpana a hiki i 1.5M, hiki iā mākou ke ʻaʻahu me ka silicon carbide.
Kahua Semiconductor, Kaʻina Hoʻoheheʻe Oxidation, Etc.
Ma ke kaʻina hana semiconductor, pono ke kaʻina hana hoʻonui oxidation i ka maʻemaʻe huahana kiʻekiʻe, a ma Semicera ke hāʻawi nei mākou i nā lawelawe kuʻuna a me CVD no ka hapa nui o nā ʻāpana carbide silicon.
Hōʻike ke kiʻi ma lalo nei i ka slurry silicon carbide o Semicea a me ka pahu kapuahi silicon carbide i hoʻomaʻemaʻe ʻia ma ka 100.0-paelepo ʻolelumi. Ke hana nei kā mākou mau limahana ma mua o ka uhi ʻana. Hiki i ka maʻemaʻe o kā mākou silicon carbide ke hiki i 99.99%, a ʻoi aku ka maʻemaʻe o ka uhi ʻana ma mua o 99.99995%.