Hāʻawi ʻo Semicera i nā ʻāpana tantalum carbide (TaC) kūikawā no nā ʻāpana like ʻole a me nā mea lawe.ʻO ke kaʻina hana hoʻopili alakaʻi Semicera e hiki ai i ka tantalum carbide (TaC) ke hoʻokō i ka maʻemaʻe kiʻekiʻe, ke kūpaʻa wela kiʻekiʻe a me ka hoʻomanawanui kiʻekiʻe, e hoʻomaikaʻi i ka maikaʻi o ka huahana o nā kristal SIC / GAN a me nā papa EPI (Kāpena ʻo TaC i uhi ʻia i ka graphite), a hoʻonui i ke ola o nā ʻāpana reactor koʻikoʻi. ʻO ka hoʻohana ʻana i ka tantalum carbide TaC coating ka mea e hoʻoponopono ai i ka pilikia lihi a hoʻomaikaʻi i ka maikaʻi o ka ulu ʻana o ke aniani, a ua hoʻopau ʻo Semicera i ka ʻenehana tantalum carbide coating (CVD), a hiki i ka pae kiʻekiʻe honua.
Ma hope o nā makahiki o ka hoʻomohala ʻana, ua lanakila ʻo Semicera i ka ʻenehana oCVD TaCme ka hooikaika pu ana o ka oihana R&D. He mea maʻalahi nā hemahema i ka ulu ʻana o nā wafers SiC, akā ma hope o ka hoʻohana ʻanaTaC, nui ka ʻokoʻa. Ma lalo iho nei ka hoʻohālikelike ʻana o nā wafers me ka TaC a me ka ʻole, a me nā ʻāpana Semicera no ka ulu ʻana o ke aniani hoʻokahi
me ka TaC ole
Ma hope o ka hoʻohana ʻana iā TaC (ʻākau)
Eia kekahi, ʻoi aku ka lōʻihi o ke ola lawelawe o Semicera's TaC coating huahana a ʻoi aku ke kūpaʻa i ka wela kiʻekiʻe ma mua o ka SiC coating. Ma hope o ka lōʻihi o ka ʻikepili ana ʻana, hiki i kā mākou TaC ke hana no ka manawa lōʻihi ma kahi kiʻekiʻe o 2300 degere Celsius. Eia kekahi o kā mākou mau laʻana.
(a) Kiʻi kiʻi kiʻi o SiC hoʻokahi ʻano mea kanu ingot e ulu ana ma ke ʻano PVT (b) Top TaC coated seed bracket (me ka SiC seed) (c) TAC-coated graphite alakaʻi apo.
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