ʻO Tantalum Carbide (TaC) i uhi ʻia i ka Wafer Susceptor

ʻO ka wehewehe pōkole:

ʻO ka uhi ʻana o ka Tantalum carbide kahi ʻenehana hoʻoheheʻe ʻia o ka honua e hoʻohana ana i ka mea tantalum carbide e hana i kahi papa pale paʻakikī, ʻaʻahu a kū i ka corrosion ma ka ʻili o ka substrate. He waiwai maikaʻi loa kēia uhi e hoʻonui nui ai i ka paʻakikī o ka mea, ke kūpaʻa wela kiʻekiʻe a me ke kūpaʻa kemika, ʻoiai e hōʻemi ana i ka friction a me ka ʻaʻahu. Hoʻohana nui ʻia nā pale carbide Tantalum i nā ʻano ʻano like ʻole, e like me ka hana ʻoihana, aerospace, ʻenekinia automotive a me nā mea lapaʻau, e hoʻonui i ke ola waiwai, hoʻomaikaʻi i ka hana hana a hōʻemi i nā kumukūʻai mālama. ʻO ka pale ʻana i nā ʻili metala mai ka corrosion a i ʻole ka hoʻonui ʻana i ke kūpaʻa ʻaʻahu a me ka pale ʻana o ka oxidation o nā ʻāpana mechanical, hāʻawi ka tantalum carbide coatings i kahi hopena hilinaʻi no nā ʻano noi.


Huahana Huahana

Huahana Huahana

Hāʻawi ʻo Semicera i nā ʻāpana tantalum carbide (TaC) kūikawā no nā ʻāpana like ʻole a me nā mea lawe.ʻO ke kaʻina hana hoʻopili alakaʻi Semicera e hiki ai i ka tantalum carbide (TaC) ke hoʻokō i ka maʻemaʻe kiʻekiʻe, ke kūpaʻa wela kiʻekiʻe a me ka hoʻomanawanui kiʻekiʻe, e hoʻomaikaʻi i ka maikaʻi o ka huahana o nā kristal SIC / GAN a me nā papa EPI (Kāpena ʻo TaC i uhi ʻia i ka graphite), a hoʻonui i ke ola o nā ʻāpana reactor koʻikoʻi. ʻO ka hoʻohana ʻana i ka tantalum carbide TaC coating no ka hoʻoponopono ʻana i ka pilikia lihi a hoʻomaikaʻi i ka maikaʻi o ka ulu ʻana o ke aniani, a ua hoʻopau ʻo Semicera Semicera i ka holomua ʻenehana tantalum carbide coating (CVD), hiki i ka pae kiʻekiʻe honua.

 

Ma hope o nā makahiki o ka hoʻomohala ʻana, ua lanakila ʻo Semicera i ka ʻenehana oCVD TaCme ka hooikaika pu ana o ka oihana R&D. He mea maʻalahi nā hemahema i ka ulu ʻana o nā wafers SiC, akā ma hope o ka hoʻohana ʻanaTaC, nui ka ʻokoʻa. Ma lalo iho nei ka hoʻohālikelike ʻana o nā wafers me ka TaC a me ka ʻole o TaC, a me nā ʻāpana ʻo Simicera 'no ka ulu aniani hoʻokahi

信图片_20240227150045

me ka TaC ole

信图片_20240227150053

Ma hope o ka hoʻohana ʻana iā TaC (ʻākau)

Eia kekahi, ʻoi aku ka lōʻihi o ke ola lawelawe o Semicera's TaC coating huahana a ʻoi aku ke kūpaʻa i ka wela kiʻekiʻe ma mua o ka SiC coating. Ma hope o ka lōʻihi o ka ʻikepili ana ʻana, hiki i kā mākou TaC ke hana no ka manawa lōʻihi ma kahi kiʻekiʻe o 2300 degere Celsius. Eia kekahi o kā mākou mau laʻana.

微信截图_20240227145010

(a) Kiʻi kiʻi kiʻi o SiC hoʻokahi ʻano mea kanu ingot e ulu ana ma ke ʻano PVT (b) Top TaC coated seed bracket (me ka SiC seed) (c) TAC-coated graphite alakaʻi apo.

ZDFVzCFV
Hiʻona nui
Kahi hana Semicera
Kahi hana Semicera 2
mīkini lako
ʻO ka hana CNN, hoʻomaʻemaʻe kemika, ka uhi CVD
ʻO kā mākou lawelawe

  • Mua:
  • Aʻe: