ʻO ka waʻa PECVD Graphite Isostatic

ʻO ka wehewehe pōkole:

Hoʻohana nui ʻia ka moku graphite Isostatic PECVD i nā loulou like ʻole o ka hana semiconductor, e like me ka polysilicon film deposition, oxide film deposition, nitride film deposition, etc.

E hoʻouna i ka leka uila iā mākou

Huahana Huahana

ʻO SEMICERA isostatic PECVD graphite boat kahi huahana graphite maʻemaʻe kiʻekiʻe i hoʻolālā ʻia no ke kākoʻo wafer ma ke kaʻina PECVD (plasma enhanced chemical vapor deposition). Hoʻohana ʻo SEMICERA i ka ʻenehana kaomi isostatic holomua e hōʻoia i ka maikaʻi o ka waʻa graphite i ke kūpaʻa kiʻekiʻe kiʻekiʻe, ka pale ʻana i ka corrosion, ke kūpaʻa dimensional a me ka conductivity thermal maikaʻi, ʻo ia ka mea pono e hoʻopau ʻia i ke kaʻina hana semiconductor.

Loaʻa i ka SEMICERA isostatic PECVD graphite boat nā pono penei:

▪ Maʻemaʻe kiʻekiʻe: ʻO ka mea graphite he maʻemaʻe kiʻekiʻe a me ka haʻahaʻa haumia haʻahaʻa e pale ai i ka haumia o ka ʻili wafer.

▪ Kiʻekiʻe kiʻekiʻe: Kiʻekiʻe kiʻekiʻe, kiʻekiʻe mechanical ikaika, hiki ke pale i ka wela kiʻekiʻe a me ke kiʻekiʻe kiʻekiʻe.

▪ Ke kūpaʻa ʻano maikaʻi: Hoʻololi liʻiliʻi liʻiliʻi i ka wela kiʻekiʻe e hōʻoia i ka paʻa o ka hana.

▪ Ka hoʻoili wela maikaʻi loa: Hoʻololi maikaʻi i ka wela no ka pale ʻana i ka wela nui.

▪ ʻO ke kūpaʻa ʻino ikaika: Hiki iā ia ke pale aku i ka ʻeli ʻana e nā kinoea kino a me ka plasma.

Palekana hana	semicera	SGL R6510	Palekana hana
ʻAno nui (g/cm3)	1.91	1.83	1.85
Ka ikaika kulou (MPa)	63	60	49
Ka ikaika compressive (MPa)	135	130	103
Paʻa Paʻa (HS)	70	64	60
Coefficient o ka hoonui wela（10-6/K）	85	105	130
Coefficient o ka hoonui wela（10-6/K）	5.85	4.2	5.0
Kū'ē (μΩm)	11-13	13	10

Nā pōmaikaʻi o ke koho ʻana iā mākou:
▪ Koho waiwai: Hoʻohana ʻia nā mea graphite maʻemaʻe kiʻekiʻe e hōʻoia i ka maikaʻi o ka huahana.
▪ ʻenehana hana ʻenehana: Hoʻohana ʻia ke kaomi Isostatic e hōʻoia i ka nui o ka huahana a me ka like.
▪ Hoʻoponopono i ka nui: Hiki ke hoʻololi ʻia nā waʻa graphite o nā ʻano nui a me nā ʻano like ʻole e like me ka makemake o ka mea kūʻai.
▪ Ka mālama ʻana i ka ʻili: Hāʻawi ʻia nā ʻano hana lapaʻau like ʻole, e like me ka uhi ʻana i ka silicon carbide, boron nitride, a me nā mea ʻē aʻe, e hoʻokō i nā koi kaʻina hana like ʻole.