MOCVD Susceptor no ka Epitaxial Growth

ʻO ka MOCVD Susceptor no ka Epitaxial Growth e semicera, kahi hopena alakaʻi i hoʻolālā ʻia e hoʻonui i ke kaʻina ulu epitaxial no nā noi semiconductor holomua. ʻO Semicera's MOCVD Susceptor e hōʻoia i ka mana pololei ma luna o ka mahana a me ka waiho ʻana o nā mea, e hoʻolilo iā ia i koho kūpono no ka loaʻa ʻana o Si Epitaxy a me SiC Epitaxy kiʻekiʻe. ʻO kāna hana paʻa a me ka conductivity thermal kiʻekiʻe e hiki ai i ka hana mau i nā kaiapuni koi, e hōʻoia ana i ka hilinaʻi e pono ai no nā ʻōnaehana ulu epitaxial.

Ua kūpono kēia MOCVD Susceptor me nā noi epitaxial like ʻole, me ka hana ʻana o Monocrystalline Silicon a me ka ulu ʻana o GaN ma SiC Epitaxy, e lilo ia i mea koʻikoʻi no nā mea hana e ʻimi nei i nā hopena kiʻekiʻe. Hoʻohui ʻia, hana maʻalahi me ka PSS Etching Carrier, ICP Etching Carrier, a me nā ʻōnaehana RTP Carrier, e hoʻonui ana i ka pono o ka hana a me ka hua. He kūpono hoʻi ka susceptor no nā noi LED Epitaxial Susceptor a me nā kaʻina hana semiconductor holomua ʻē aʻe.

Me kāna hoʻolālā maʻamau, hiki ke hoʻololi ʻia ka susceptor MOCVD semicera no ka hoʻohana ʻana i Pancake Susceptors a me Barrel Susceptors, e hāʻawi ana i ka maʻalahi i nā hoʻonohonoho hana like ʻole. ʻO ka hoʻohui ʻana o nā ʻāpana Photovoltaic e hoʻonui i kāna noi, e kūpono ana ia no nā ʻoihana semiconductor a me nā lā. Hāʻawi kēia hāʻina hana kiʻekiʻe i ke kūpaʻa wela maikaʻi a me ka lōʻihi, e hōʻoia ana i ka maikaʻi o ka wā lōʻihi i nā kaʻina ulu epitaxial.