Introduction to semiconductor-grade glassy carbon coating

I. Introduction to glassy carbon structure

Nā hiʻohiʻona:

(1) He laumania ka ili o ke kalapona aniani a he ano aniani kona;

(2) He kiʻekiʻe ka paʻakikī a me ka lepo lepo haʻahaʻa;

(3) Loaʻa i ke kalapona aniani ka nui ID / IG waiwai a me kahi haʻahaʻa haʻahaʻa o ka graphitization, a ʻoi aku ka maikaʻi o kāna hana insulation thermal;

(4) ʻO ke kalapona aniani he kalapona paʻakikī i ka graphitize me ke kūpaʻa kiʻekiʻe kiʻekiʻe maikaʻi a me ke kūpaʻa ikaika i nā wela kiʻekiʻe;

(5) He wahi liʻiliʻi ko ke kalapona aniani a ʻoi aku ka maikaʻi o ka pale ʻana i ka corrosion, a ʻoi aku ke kūpaʻa i ka erosion e ka oxygen, silicon, etc.

II. Introduction to glassy carbon coating

Hoʻokaʻawale ʻia nā pores o ka graphite coating flake a wehe ʻia ke ʻano, ʻoiai ua paʻa ke ʻano o ka uhi kalapona aniani a ʻaʻole hāʻule!

1. Anti-oxidation hana o glassy kalapona uhi

(1)Laminated paa paa
Hoʻomaikaʻi maikaʻi ka uhi kalapona Glassy i ka hana anti-oxidation o ka paʻakikī;

(2)ʻO ka fiber pōkole ʻoi aku ka paʻakikī
ʻO ka manaʻo holoʻokoʻa he porosity kiʻekiʻe a hāʻawi i nā kahawai oxygen; ʻO ka uhi ʻana o ka flake graphite he ʻano wehe, ʻoi aku ka liʻiliʻi o nā kaila oxygen, a hoʻomaikaʻi i ka hana anti-oxidation; ʻO ka uhi kalapona aniani i uhi ʻia he ʻano paʻa, liʻiliʻi nā kahawai oxygen, a me ka hana anti-oxidation maikaʻi loa.

2. Ke kūpaʻa kiʻekiʻe o ka uhi kalapona aniani i ka ablation
Hiki ke ho'ēmi i ka wela (heat convection heat dissipation); ʻO ka pepa graphite e maʻalahi i ka blistering ke hoʻopau ʻia; ʻO ka hohonu ablation o ka uhi kalapona aniani ka pāpaʻu loa, a ʻo kona kūpaʻa ablation ka ikaika loa; ʻO ka uhi kalapona aniani he maikaʻi ka hana insulation thermal.

3. Anati-Si erosion hana o glassy kalapona uhi
Hoʻopau ʻia a pauda e Si; He kū'ē ka pale graphite flake i ka erosion i ka wā pōkole; ʻO ka uhi kalapona aniani ka hana anti-erosion maikaʻi loa.

ʻO ke kumu nui o ka Si erosion, ʻo ia ka hoʻopau pono ʻana o ka Si gasification i ka ʻili o ka mea paʻakikī, e hopena i ka pauda; ʻoiai ʻoi aku ka paʻa o ke ʻano kalapona o ka uhi kalapona aniani a ʻoi aku ka maikaʻi o ka hana anti-erosion.

Hōʻuluʻulu manaʻo

ʻAʻole hoʻohana wale ʻia ka ʻōnaehana kalapona aniani i nā mea insulation thermal, akā manaʻo ʻia e hoʻohana pololei ʻia ma ka ʻili o nā ʻāpana graphite aʻāpana C/C, hoʻomaikaʻi maikaʻi i ka hana lawelawe piha o ka mea.