Silicon carbide History a me Silicon Carbide Coating Application

ʻO ka hoʻomohala ʻana a me nā noi ʻana o Silicon Carbide (SiC)

1. He Keneturi o ka Hana Hou ma SiC
Ua hoʻomaka ka huakaʻi o ka silicon carbide (SiC) i ka makahiki 1893, i ka wā i hoʻolālā ai ʻo Edward Goodrich Acheson i ka umu Acheson, me ka hoʻohana ʻana i nā mea kalapona e hoʻokō ai i ka hana ʻenehana o SiC ma o ka hoʻomehana uila o ka quartz a me ke kalapona. Ua hōʻailona kēia mea hana i ka hoʻomaka ʻana o ka ʻoihana ʻoihana a SiC a loaʻa iā Acheson kahi patent.

I ka hoʻomaka ʻana o ke kenekulia 20, ua hoʻohana mua ʻia ʻo SiC ma ke ʻano he abrasive ma muli o kona ʻano paʻakikī a me ke kūpaʻa ʻana. Ma ka waena o ke kenekulia 20, ua wehe ka holomua o ka ʻenehana vapor deposition (CVD) i nā mea hou. ʻO nā mea noiʻi ma Bell Labs, alakaʻi ʻia e Rustum Roy, ua hoʻokumu i ke kumu no CVD SiC, e loaʻa ana i nā uhi SiC mua ma nā papa graphite.

Ua ʻike ka 1970s i kahi holomua nui i ka wā i hoʻohana ai ʻo Union Carbide Corporation i ka graphite i uhi ʻia ʻo SiC i ka ulu epitaxial o nā mea semiconductor gallium nitride (GaN). He hana koʻikoʻi kēia holomua i nā LED a me nā laser kiʻekiʻe o GaN. I nā makahiki he mau makahiki, ua hoʻonui ʻia nā uhi SiC ma mua o nā semiconductors i nā noi i ka aerospace, automotive, a me ka uila uila, mahalo i ka hoʻomaikaʻi ʻana i nā ʻenehana hana.

I kēia lā, hoʻonui hou nā mea hou e like me ka thermal spraying, PVD, a me ka nanotechnology i ka hana a me ka hoʻohana ʻana o nā uhi SiC, e hōʻike ana i kona hiki i nā māla ʻoki.

2. Ka hoʻomaopopo ʻana i nā ʻano hana a me ka hoʻohana ʻana o SiC
Hoʻohanohano ʻo SiC ma luna o 200 polytypes, hoʻokaʻawale ʻia e kā lākou hoʻonohonoho atomic i cubic (3C), hexagonal (H), a me rhombohedral (R). Ma waena o kēia mau mea, hoʻohana nui ʻia ka 4H-SiC a me 6H-SiC i nā mea mana kiʻekiʻe a me nā optoelectronic, ʻoiai ʻo β-SiC ka waiwai no kāna conductivity thermal kiʻekiʻe, ke kūpaʻa ʻaʻahu, a me ka pale ʻana i ka corrosion.

Nā β-SiC'ano kūikawā, e like me ka thermal conductivity o120-200 W/m·Ka me ke koena hoʻonui wela e pili pono ana i ka graphite, e hoʻolilo iā ia i mea i makemake ʻia no ka uhi ʻana o ka ʻili i nā lako wafer epitaxy.

3. SiC Coatings: Nā Pono a me nā ʻenehana hoʻomākaukau
Hoʻohana nui ʻia nā uhi SiC, maʻamau β-SiC, e hoʻomaikaʻi i nā waiwai o ka ʻili e like me ka paʻakikī, ke kūpaʻa ʻana, a me ke kūpaʻa wela. ʻO nā ʻano hana maʻamau o ka hoʻomākaukau ʻana he:

• ʻO ka waiho ʻana o ka mahu (CVD):Hāʻawi i nā uhi kiʻekiʻe me ka hoʻopili maikaʻi a me ke kūlike, kūpono no nā substrates nui a paʻakikī.
• ʻO ka waiho ʻana o ka mahu kino (PVD):Hāʻawi i ka mana pololei ma luna o ka haku mele, kūpono no nā noi kiʻekiʻe.
• ʻO nā ʻenehana hoʻoheheʻe ʻana, Electrochemical Deposition, a me Slurry Coating: E lawelawe ma ke ʻano he kumu kūʻai kūpono no nā noi kikoʻī, ʻoiai me nā palena ʻokoʻa i ka adhesion a me ka like ʻole.

Koho ʻia kēlā me kēia ala e pili ana i nā ʻano substrate a me nā koi noi.

4. Nā Susceptors Graphite i uhi ʻia ʻo SiC ma MOCVD
He mea nui ka SiC-coated graphite susceptors i Metal Organic Chemical Vapor Deposition (MOCVD), kahi hana koʻikoʻi i ka hana semiconductor a me optoelectronic.

Hāʻawi kēia mau mea susceptors i ke kākoʻo paʻa no ka ulu ʻana o ka kiʻiʻoniʻoni epitaxial, e hōʻoiaʻiʻo ana i ka paʻa wela a me ka hōʻemi ʻana i ka haumia. Hoʻonui ka SiC coating i ka pale ʻana i ka oxidation, nā waiwai o ka ʻili, a me ka maikaʻi o ka interface, e ʻae ai i ka mana pololei i ka ulu ʻana o ke kiʻiʻoniʻoni.

5. Holomua i ka wā e hiki mai ana
I nā makahiki i hala iho nei, ua kuhikuhi ʻia nā hana koʻikoʻi i ka hoʻomaikaʻi ʻana i nā kaʻina hana o nā substrates graphite i uhi ʻia ʻo SiC. Ke nānā nei nā mea noiʻi i ka hoʻonui ʻana i ka maʻemaʻe o ka uhi ʻana, ka like ʻole, a me ke ola ʻana i ka wā e hōʻemi ana i nā kumukūʻai. Eia kekahi, ʻo ka ʻimi ʻana i nā mea hou e like menā mea hoʻopili tantalum carbide (TaC).hāʻawi i ka hoʻomaikaʻi ʻana i ka conductivity thermal a me ka pale ʻana i ka corrosion, e hoʻokaʻawale i ke ala no nā hopena o ka hanauna e hiki mai ana.

Ke hoʻomau nei ka noi ʻana no nā susceptors graphite SiC-coated, e kākoʻo hou ka holomua i ka hana akamai a me ka hana ʻenehana i ka hoʻomohala ʻana i nā huahana kiʻekiʻe e hoʻokō i nā pono e ulu nei o nā ʻoihana semiconductor a me optoelectronics.