He aha ka epitaxy?

ʻAʻole kamaʻāina ka hapa nui o nā ʻenekiniaepitaxy, he kuleana koʻikoʻi i ka hana ʻana i nā mea hana semiconductor.Epitaxyhiki ke hoʻohana ʻia i nā huahana chip like ʻole, a loaʻa nā ʻano huahana like ʻole o ka epitaxy, meʻO ka epitaxy, SiC epitaxy, GaN epitaxy, etc.

He aha ka epitaxy?
Ua kapa pinepine ʻia ʻo Epitaxy "Epitaxy" ma ka ʻōlelo Pelekania. No ka huaʻōlelo Helene "epi" (ʻo ia hoʻi "ma luna") a me "taxi" (ʻo ia hoʻi "hoʻonohonoho"). E like me ka hōʻike ʻana o ka inoa, ʻo ia ka hoʻonohonoho pono ʻana ma luna o kahi mea. ʻO ke kaʻina hana epitaxy ka waiho ʻana i kahi ʻāpana aniani lahilahi ma luna o kahi pani aniani hoʻokahi. Ua kapa ʻia kēia ʻāpana kristal hoʻokahi i waiho ʻia he papa epitaxial.

ʻElua ʻano nui o ka epitaxy: homoepitaxial a me heteroepitaxial. ʻO ka Homoepitaxial e pili ana i ka ulu ʻana i ka mea like ma ke ʻano like o ka substrate. ʻO ka papa epitaxial a me ka substrate he ʻano like like. ʻO Heteroepitaxy ka ulu ʻana o kekahi mea ʻē aʻe ma luna o kahi substrate o hoʻokahi mea. I kēia hihia, ʻokoʻa paha ke ʻano o ka lattice o ka papa aniani epitaxially grown a me ka substrate. He aha nā kristal hoʻokahi a me ka polycrystalline?
I loko o nā semiconductor, lohe pinepine mākou i nā huaʻōlelo hoʻokahi silika aniani a me ke silika polycrystalline. No ke aha i kapa ʻia ai kekahi kilika he mau kristal hoʻokahi a ʻo kekahi kilika i kapa ʻia he polycrystalline?

Hoʻokahi aniani: ʻO ka hoʻonohonoho lattice e hoʻomau a loli ʻole, me ka ʻole o nā palena o ka palaoa, ʻo ia hoʻi, ua haku ʻia ke aniani holoʻokoʻa i hoʻokahi lattice me ke ʻano aniani like. Polycrystalline: Ua haku ʻia ka Polycrystalline me nā ʻano kīʻaha liʻiliʻi he nui, ʻo kēlā me kēia mea he aniani hoʻokahi, a ʻo kā lākou hoʻonohonoho ʻana he mea maʻamau e pili ana i kekahi i kekahi. Hoʻokaʻawale ʻia kēia mau hua e nā palena ʻai. ʻOi aku ka haʻahaʻa o ke kumu kūʻai o nā mea polycrystalline ma mua o nā kristal hoʻokahi, no laila pono lākou i kekahi mau noi. Ma hea kahi e pili ai ka hana epitaxial?
I ka hana ʻana i nā kaʻa kaʻa i hoʻohui ʻia e pili ana i ka silicon, hoʻohana nui ʻia ke kaʻina hana epitaxial. No ka laʻana, hoʻohana ʻia ka epitaxy silicon no ka ulu ʻana i kahi papa silika maʻemaʻe a hoʻomalu maikaʻi ʻia ma luna o kahi substrate silicon, he mea nui loa ia no ka hana ʻana i nā kaapuni hoʻohui holomua. Eia kekahi, ma nā mana mana, ʻo SiC a me GaN ʻelua mau mea hoʻohana maʻamau ʻo bandgap semiconductor me nā mana hoʻokele maikaʻi loa. Hoʻoulu pinepine ʻia kēia mau mea ma luna o ke silika a i ʻole nā ​​​​palapala ʻē aʻe ma o ka epitaxy. Ma ke kamaʻilio quantum, hoʻohana maʻamau nā ʻāpana quantum e pili ana i ka semiconductor i nā hale epitaxial silicon germanium. Etc.

Nā ʻano o ka ulu epitaxial?

ʻEkolu hana maʻamau epitaxy semiconductor:

Molecular beam epitaxy (MBE): Molecular beam epitaxy) he ʻenehana ulu epitaxial semiconductor i hana ʻia ma lalo o nā kūlana ʻūhā kiʻekiʻe. I loko o kēia ʻenehana, hoʻoheheʻe ʻia ka mea kumu ma ke ʻano o nā ʻātoma a i ʻole nā ​​molecular beam a laila waiho ʻia ma kahi substrate crystalline. MBE mea he loa pololei a me ka controllable semiconductor lahilahi kiʻiʻoniʻoni ulu ulu i hiki precisely kaohi i ka mānoanoa o ka mea waiho ma ka atomic pae.

Metal organic CVD (MOCVD): Ma ke kaʻina MOCVD, hāʻawi ʻia nā metala organik a me nā kinoea hydride i loaʻa nā mea pono i ka substrate i kahi mahana kūpono, a ua hana ʻia nā mea semiconductor i koi ʻia ma o nā hopena kemika a waiho ʻia ma ka substrate, ʻoiai ke koena. hoʻokuʻu ʻia nā mea hoʻohui a me nā huahana hopena.

Vapor Phase Epitaxy (VPE): ʻO Vapor Phase Epitaxy kahi ʻenehana koʻikoʻi i hoʻohana mau ʻia i ka hana ʻana i nā mea semiconductor. ʻO kāna kumu kumu, ʻo ia ka lawe ʻana i ka mahu o kahi mea hoʻokahi a i ʻole ka hui i loko o ke kinoea lawe a waiho i nā kristal ma kahi substrate ma o nā hopena kemika.