Hāʻawi ʻo Semicera i nā ʻāpana tantalum carbide (TaC) kūikawā no nā ʻāpana like ʻole a me nā mea lawe.ʻO ke kaʻina hana hoʻopili alakaʻi Semicera e hiki ai i ka tantalum carbide (TaC) ke hoʻokō i ka maʻemaʻe kiʻekiʻe, ke kūpaʻa wela kiʻekiʻe a me ka hoʻomanawanui kiʻekiʻe, e hoʻomaikaʻi i ka maikaʻi o ka huahana o nā kristal SIC / GAN a me nā papa EPI (Kāpena ʻo TaC i uhi ʻia i ka graphite), a hoʻonui i ke ola o nā ʻāpana reactor koʻikoʻi. ʻO ka hoʻohana ʻana i ka tantalum carbide TaC coating ka mea e hoʻoponopono ai i ka pilikia lihi a hoʻomaikaʻi i ka maikaʻi o ka ulu ʻana o ke aniani, a ua hoʻopau ʻo Semicera i ka ʻenehana tantalum carbide coating (CVD), a hiki i ka pae kiʻekiʻe honua.
Me ka hiki ʻana mai o nā wafers silicon carbide (SiC), ua maʻalahi nā koi no nā kaʻina semiconductor like ʻole, ʻoi aku hoʻi no nā kaʻina epitaxy kahi e hiki ai ke mahana ma mua o 2000 degere Celsius. ʻO nā mea susceptor kuʻuna, e like me ka graphite i uhi ʻia me ka silicon carbide, e hoʻohaʻahaʻa i kēia mau wela kiʻekiʻe, e hoʻopau i ke kaʻina hana epitaxy. Eia nō naʻe, hoʻoponopono maikaʻi ʻo CVD tantalum carbide (TaC) i kēia pilikia, me ka pale ʻana i nā mahana a hiki i 2300 degere Celsius a hāʻawi i kahi ola lawelawe lōʻihi. Hoʻokaʻaʻike Semicera's ʻO ka mea hoʻopiʻi hoʻopili TaCe ʻimi hou aku e pili ana i kā mākou mau hoʻonā holomua.
Ma hope o nā makahiki o ka hoʻomohala ʻana, ua lanakila ʻo Semicera i ka ʻenehana oCVD TaCme ka hooikaika pu ana o ka oihana R&D. He mea maʻalahi nā hemahema i ka ulu ʻana o nā wafers SiC, akā ma hope o ka hoʻohana ʻanaTaC, nui ka ʻokoʻa. Ma lalo iho nei ka hoʻohālikelike ʻana o nā wafers me ka TaC a me ka ʻole o TaC, a me nā ʻāpana ʻo Simicera 'no ka ulu aniani hoʻokahi.
me ka TaC ole
Ma hope o ka hoʻohana ʻana iā TaC (ʻākau)
Eia kekahi, ʻo SemiceraNā huahana i uhi ʻia e TaChōʻike i kahi ola lawelawe lōʻihi a ʻoi aku ka nui o ke kūpaʻa wela kiʻekiʻe i hoʻohālikelike ʻia meʻO nā uhi SiC.Ua hōʻike ʻia nā ana Laboratory i kā mākouʻO nā pale TaChiki ke hana mau i ka wela a hiki i 2300 degere Celsius no nā manawa lōʻihi. Aia ma lalo kekahi mau laʻana o kā mākou mau laʻana:
