ʻO ka hoʻokomo ʻana i ka mea lawe wafer
HUI HUA
▶Pūnaehana Wafer Carrier no ka hana PECVD & TALOX
• PECVD & TALOX Graphite Waapa (M4~M12)
• Waapa SM Vertical (M4, M6)
• Hoʻokomo a me ka ʻauʻau ʻāpana Graphite (M4~M6)
• Pāʻani C/C a me ka uhi ʻula
• Metala RIE-Pray a me ka hoʻoheheʻe seramika
• Hoʻopaʻa hoʻopaʻa ʻana: O-Ring & SQ-Ring
▶Ke Kaʻina Hoʻololi Texturing & Wet Etching
• LSC H-Carrier a i ʻole cassette (M4~M12)
• LSC V-Carrier a i ʻole cassette (M4~M12)
• Lawelawe ASC a i ʻole cassette (M4, M6)
• W/F ka mea lawe a me ka pahu waihona (M4~M12)
• Huila Kaʻa (Roller) Series
▶Ka mea lawe kala a me ka mea lawe metala
• TRC mea lawe a i ʻole cassette (M4~M12)
• Mīkini (me BELT)
GRAPHITE BOAT (H-Kano)
19P6-216CT (WF M4~M12)
GRAPHITE BOAT (H-Kano)
21P6-240CT WF M4~M12)
GRAPHITE BOAT (H-Kano)
23P7-308CT(W/F M4~M12)
GRAPHITE BOAT (H-Kano)
22P/7-294TP (W/F M4~M12)
GRAPHITE BOAT (H-Kano)
W182-22P7-294CT (W/F M12)
W182-21P6-240CT (W/F M12)
WF lawe lawe a me ka pahu mālama (~M12)
C/C TRAY a i ʻole CARRIER (M4~M10)
C/C TRAY a i ʻole CARRIER (M4~M10)
WAKAHA VERTICAL (SM) M6
LSC-H-KAHA(~M12)
LSC-V-MAKA(~M12)
KA LAWE ASC (~M6)
TRC lawe lawe (~M12)
TRC lawe lawe (~M12)
GRAPHITE-BOAT(M12)
Pūnaehana Wafer Carrier no ka hana PECVD
▶ GRAPHITE BOAT (CT-Designed) M10/M12 Kaʻina
• KA MANAʻO HOʻOHANA NUI
▶ GRAPHITE BOAT (CT-Designed) M4/M6 Kaʻina
▶ Nā ʻāpana koʻikoʻi WAPA
▶ WAPA VERTICAL-161.7mm WAFER
▶ WAPA VERTICAL-166mm WAFER
▶ WAPA VERTICAL-161.7mm, 166mm WAFER
ʻO ka lawe ʻana o ka lā a me ka mea lawe metala TRC
TYPE : ʻOtometi
NUI WAFER : ① 156×156MM ② 156.75×156.75MM
③161.7x161.7MM ④166x166MM
⑤ 180×180mm ⑥ 210×210mm
KA HOʻohana: Haʻi (Cassette)
NUI: 100 pepa
PITCH: 4.76MM/5.953mm/6.35mm
NANA: Ma kahi o 559×220×220MM
Ma kahi o 712×260×260MM
KA PONO : Ka Lewa
MATERIAL: FLAME, SIDE BAR-Aluminum (anodizing)
PALAPALA-POM (Atistatic)
Ka uhi o ka pahu lalo-EPDM/PU/VITON (ASE)
TRC-METAL CARRIER (U'SER LINE)
TRC-METAL CARRIER (U'SER LINE)
TRC-METAL CARRIER (U'SER LINE)
PAPA HOI & PAPA ANA, KA MEA HIKI
