Semicerahauʻoli e hāʻawi i kaPFA Cassette, he koho maikaʻi loa no ka lawelawe ʻana i ka wafer i nā kaiapuni kahi i koʻikoʻi ai ke kūpaʻa a me ka lōʻihi. Hana ʻia mai nā mea Perfluoroalkoxy (PFA) maʻemaʻe kiʻekiʻe, ua hoʻolālā ʻia kēia cassette e kū i nā kūlana koʻikoʻi i ka hana semiconductor, e hōʻoiaʻiʻo ana i ka palekana a me ka pololei o kāu mau wafers.
Kūʻē Kemika Kūlike ʻoleʻO kaPFA Cassetteua hoʻolālā ʻia e hāʻawi i ke kūpaʻa ʻoi aku ka nui o nā mea kemika, e lilo ia i koho kūpono loa no nā kaʻina hana e pili ana i nā waikawa aggressive, solvents, a me nā kemika koʻikoʻi ʻē aʻe. ʻO kēia kūpaʻa kemika ikaika e hōʻoiaʻiʻo i ka paʻa a me ka hana o ka cassette ma nā wahi ʻino loa, a laila e hoʻolōʻihi i kona ola a hōʻemi i ka pono o nā pani pinepine.
Hana Maemae KiʻekiʻeʻO SemiceraPFA Cassettehana ʻia mai nā mea PFA ultra-maʻemaʻe, he mea koʻikoʻi ia i ka pale ʻana i ka ʻino i ka wā o ka hana wafer. ʻO kēia hana maʻemaʻe kiʻekiʻe e hōʻemi i ka pilikia o ka hana ʻana i nā mea ʻala a me ka leaching kemika, e hōʻoia ana e pale ʻia kāu mau wafers mai nā haumia e hiki ke hoʻololi i ko lākou maikaʻi.
Hoʻonui i ka lōʻihi a me ka hanaHoʻolālā ʻia no ka lōʻihi, kaPFA Cassettemālama ʻia kona kūpaʻa ʻana ma lalo o nā mahana wela a me nā kūlana hana paʻa. Inā ʻike ʻia i nā wela kiʻekiʻe a i ʻole e hoʻokau pinepine ʻia, mālama kēia cassette i kona ʻano a me kāna hana, e hāʻawi ana i ka hilinaʻi lōʻihi i ke koi ʻana i nā wahi hana.
ʻEnekinia Pono no ka Hoʻohana PaʻaʻO kaSemicera PFA Cassettenā hiʻohiʻona ʻenehana pololei e hōʻoiaʻiʻo i ka mālama ʻana i ka wafer paʻa a paʻa. Hoʻolālā maikaʻi ʻia kēlā me kēia slot e hoʻopaʻa paʻa i nā wafers ma kahi paʻa, e pale i ka neʻe ʻana a i ʻole ka hoʻololi ʻana i hiki ke hopena i ka pōʻino. Kākoʻo kēia ʻenekinia pololei i ka hoʻokomo ʻana i ka wafer kūpono, e hāʻawi ana i ka pono holoʻokoʻa holoʻokoʻa.
Hoʻohana maʻamau i nā kaʻina hanaMahalo i kona mau waiwai waiwai, kaPFA Cassettehiki ke hoʻohana ʻia ma nā pae like ʻole o ka hana semiconductor. He kūpono loa ia no ka etching wet, chemical vapor deposition (CVD), a me nā kaʻina hana ʻē aʻe e pili ana i nā kaiapuni kemika paʻakikī. ʻO kona hiki ke hoʻololi ʻia he mea hana pono ia i ka mālama ʻana i ka pono o ke kaʻina hana a me ka maikaʻi o ka wafer.
Hoʻoholo i ka maikaʻi a me ka hana houMa Semicera, ua kūpaʻa mākou i ka hāʻawi ʻana i nā huahana e kū ana i nā kūlana ʻoihana kiʻekiʻe. ʻO kaPFA Cassettehōʻike i kēia kūpaʻa, hāʻawi i kahi hopena hilinaʻi e hoʻohui pono i kāu mau hana hana. Loaʻa i kēlā me kēia cassette ka mana koʻikoʻi e hōʻoia i ka hoʻokō ʻana i kā mākou mau pae hoʻokō koʻikoʻi, e hāʻawi ana i ka maikaʻi āu e manaʻo ai mai Semicera.
| Nā mea | Paahana | Ka noiʻi | Dummy |
| Nā Kūlana Crystal | |||
| Polytype | 4H | ||
| Ua hewa ka hoʻonohonoho ʻana o ka ʻili | <11-20 >4±0.15° | ||
| Nā Kūlana Uila | |||
| Dopant | n-ʻano Nitrogen | ||
| Kū'ē | 0.015-0.025ohm·cm | ||
| Nā Kūlana Mechanical | |||
| Anawaena | 150.0±0.2mm | ||
| mānoanoa | 350±25 μm | ||
| Kūlana pālahalaha mua | [1-100]±5° | ||
| Ka lōʻihi pālahalaha mua | 47.5±1.5mm | ||
| palahalaha lua | ʻAʻohe | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| Kakaka | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤35 μm | ≤45 μm | ≤55 μm |
| 'Oka (AFM) mua (Si-maka) | Ra≤0.2nm (5μm*5μm) | ||
| Hoʻolālā | |||
| Micropipe mānoanoa | <1 ea/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Metala haumia | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| ʻAno o mua | |||
| Imua | Si | ||
| Hoʻopau ʻili | Si-maka CMP | ||
| Nā ʻāpana | ≤60ea/wafer (nui≥0.3μm) | NA | |
| Nā ʻōpala | ≤5ea/mm. Ka lōʻihi huila ≤Diameter | ʻO ka lōʻihi huila≤2*Diameter | NA |
| ʻAlani ʻili/mau lua/ʻeleʻele/striations/ māwae/contamination | ʻAʻohe | NA | |
| Nā ʻāpana lihi/indents/fracture/papa hex | ʻAʻohe | ||
| Nā wahi polytype | ʻAʻohe | ʻĀpana huila≤20% | ʻĀpana huila≤30% |
| Hōʻailona laser mua | ʻAʻohe | ||
| ʻAno o hope | |||
| Hoʻopau hope | C-maka CMP | ||
| Nā ʻōpala | ≤5ea / mm, Ka lōʻihi huila≤2 * Anawaena | NA | |
| Nā hemahema o hope (nā ʻāpana lihi/indents) | ʻAʻohe | ||
| ʻōkalakala kua | Ra≤0.2nm (5μm*5μm) | ||
| Hōʻailona laser hope | 1 mm (mai ka lihi luna) | ||
| Kaulana | |||
| Kaulana | Chamfer | ||
| Hoʻopili ʻia | |||
| Hoʻopili ʻia | Epi-mākaukau me ka hoʻopaʻa ʻumeke Puke cassette nui-wafer | ||
| *Nā memo: "NA" ʻo ia hoʻi, ʻaʻohe noi ʻO nā mea i ʻōlelo ʻole ʻia e pili ana i SEMI-STD. | |||
