PFA Cassette

ʻO ka wehewehe pōkole:

PFA Cassette- E ʻike i ke kūpaʻa ʻole a me ka lōʻihi me Semicera's PFA Cassette, ka hopena kūpono no ka mālama pono ʻana i ka wafer i ka hana semiconductor.


Huahana Huahana

Huahana Huahana

Semicerahauʻoli e hāʻawi i kaPFA Cassette, he koho maikaʻi loa no ka lawelawe ʻana i ka wafer i nā kaiapuni kahi i koʻikoʻi ai ke kūpaʻa a me ka lōʻihi. Hana ʻia mai nā mea Perfluoroalkoxy (PFA) maʻemaʻe kiʻekiʻe, ua hoʻolālā ʻia kēia cassette e kū i nā kūlana koʻikoʻi i ka hana semiconductor, e hōʻoiaʻiʻo ana i ka palekana a me ka pololei o kāu mau wafers.

Kūʻē Kemika Kūlike ʻoleʻO kaPFA Cassetteua hoʻolālā ʻia e hāʻawi i ke kūpaʻa ʻoi aku ka nui o nā mea kemika, e lilo ia i koho kūpono loa no nā kaʻina hana e pili ana i nā waikawa aggressive, solvents, a me nā kemika koʻikoʻi ʻē aʻe. ʻO kēia kūpaʻa kemika ikaika e hōʻoiaʻiʻo i ka paʻa a me ka hana o ka cassette ma nā wahi ʻino loa, a laila e hoʻolōʻihi i kona ola a hōʻemi i ka pono o nā pani pinepine.

Hana Maemae KiʻekiʻeʻO SemiceraPFA Cassettehana ʻia mai nā mea PFA ultra-maʻemaʻe, he mea koʻikoʻi ia i ka pale ʻana i ka ʻino i ka wā o ka hana wafer. ʻO kēia hana maʻemaʻe kiʻekiʻe e hōʻemi i ka pilikia o ka hana ʻana i nā mea ʻala a me ka leaching kemika, e hōʻoia ana e pale ʻia kāu mau wafers mai nā haumia e hiki ke hoʻololi i ko lākou maikaʻi.

Hoʻonui i ka lōʻihi a me ka hanaHoʻolālā ʻia no ka lōʻihi, kaPFA Cassettemālama ʻia kona kūpaʻa ʻana ma lalo o nā mahana wela a me nā kūlana hana paʻa. Inā ʻike ʻia i nā wela kiʻekiʻe a i ʻole e hoʻokau pinepine ʻia, mālama kēia cassette i kona ʻano a me kāna hana, e hāʻawi ana i ka hilinaʻi lōʻihi i ka koi ʻana i nā wahi hana.

ʻEnekinia Pono no ka Hoʻohana PaʻaʻO kaSemicera PFA Cassettenā hiʻohiʻona ʻenehana pololei e hōʻoiaʻiʻo i ka mālama ʻana i ka wafer paʻa a paʻa. Hoʻolālā maikaʻi ʻia kēlā me kēia slot e hoʻopaʻa paʻa i nā wafers ma kahi paʻa, e pale i ka neʻe ʻana a i ʻole ka hoʻololi ʻana i hiki ke hopena i ka pōʻino. Kākoʻo kēia ʻenekinia pololei i ka hoʻokomo ʻana i ka wafer kūpono, e hāʻawi ana i ka pono holoʻokoʻa holoʻokoʻa.

Hoʻohana maʻamau i nā kaʻina hanaMahalo i kona mau waiwai waiwai, kaPFA Cassettehiki ke hoʻohana ʻia ma nā pae like ʻole o ka hana semiconductor. He kūpono loa ia no ka etching wet, chemical vapor deposition (CVD), a me nā kaʻina hana ʻē aʻe e pili ana i nā kaiapuni kemika paʻakikī. ʻO kona hiki ke hoʻololi ʻia he mea hana pono ia i ka mālama ʻana i ka pololei o ke kaʻina hana a me ka maikaʻi o ka wafer.

Hoʻoholo i ka maikaʻi a me ka hana houMa Semicera, ua kūpaʻa mākou i ka hāʻawi ʻana i nā huahana e kū ana i nā kūlana ʻoihana kiʻekiʻe. ʻO kaPFA Cassettehōʻike i kēia kūpaʻa, hāʻawi i kahi hopena hilinaʻi e hoʻohui pono i kāu mau hana hana. Loaʻa i kēlā me kēia cassette ka mana koʻikoʻi e hōʻoia i ka hoʻokō ʻana i kā mākou mau pae hoʻokō koʻikoʻi, e hāʻawi ana i ka maikaʻi āu e manaʻo ai mai Semicera.

Nā mea

Paahana

Ka noiʻi

Dummy

Nā Kūlana Crystal

Polytype

4H

Ua hewa ka hoʻonohonoho ʻana o ka ʻili

<11-20 >4±0.15°

Nā Kūlana Uila

Dopant

n-ʻano Nitrogen

Kū'ē

0.015-0.025ohm·cm

Nā Kūlana Mechanical

Anawaena

150.0±0.2mm

mānoanoa

350±25 μm

Kūlana pālahalaha mua

[1-100]±5°

Ka lōʻihi pālahalaha mua

47.5±1.5mm

palahalaha lua

ʻAʻohe

TTV

≤5 μm

≤10 μm

≤15 μm

LTV

≤3 μm(5mm*5mm)

≤5 μm(5mm*5mm)

≤10 μm(5mm*5mm)

Kakaka

-15μm ~ 15μm

-35μm ~ 35μm

-45μm ~ 45μm

Warp

≤35 μm

≤45 μm

≤55 μm

'Oka (AFM) mua (Si-maka)

Ra≤0.2nm (5μm*5μm)

Hoʻolālā

Micropipe mānoanoa

<1 ea/cm2

<10 ea/cm2

<15 ea/cm2

Metala haumia

≤5E10atoms/cm2

NA

BPD

≤1500 ea/cm2

≤3000 ea/cm2

NA

TSD

≤500 ea/cm2

≤1000 ea/cm2

NA

ʻAno o mua

Imua

Si

Hoʻopau ʻili

Si-maka CMP

Nā ʻāpana

≤60ea/wafer (nui≥0.3μm)

NA

Nā ʻōpala

≤5ea/mm. Ka lōʻihi huila ≤Diameter

ʻO ka lōʻihi huila≤2*Diameter

NA

ʻAlani ʻili/mau lua/ʻeleʻele/striations/ māwae/contamination

ʻAʻohe

NA

Nā ʻāpana lihi/indents/fracture/papa hex

ʻAʻohe

Nā wahi polytype

ʻAʻohe

ʻĀpana huila≤20%

ʻĀpana huila≤30%

Hōʻailona laser mua

ʻAʻohe

ʻAno o hope

Hoʻopau hope

C-maka CMP

Nā ʻōpala

≤5ea / mm, Ka lōʻihi huila≤2 * Anawaena

NA

Nā pōʻino hope (nā ʻāpana lihi/indents)

ʻAʻohe

ʻōkalakala kua

Ra≤0.2nm (5μm*5μm)

Hōʻailona laser hope

1 mm (mai ka lihi luna)

Kaulana

Kaulana

Chamfer

Hoʻopili ʻia

Hoʻopili ʻia

Epi-mākaukau me ka hoʻopaʻa ʻumeke

Puke cassette nui-wafer

*Nā memo: "NA" ʻo ia hoʻi, ʻaʻohe noi ʻO nā mea i ʻōlelo ʻole ʻia e pili ana i SEMI-STD.

tech_1_2_size
SiC wafers

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