Semicerahoʻolauna i kaPākuʻi Semiconductor, he mea hana pono no ka mālama pono ʻana i nā wafers ma ke kaʻina hana semiconductor. Hana ʻia me ka pololei kiʻekiʻe, ʻo kēia cassette e hōʻoia i ka mālama pono ʻana a lawe ʻia kāu mau wafers, e mālama ana i ko lākou kūpaʻa i kēlā me kēia pae.
ʻOi aku ka palekana a me ka lōʻihiʻO kaPākuʻi Semiconductormai Semicera i kūkulu ʻia e hāʻawi i ka pale nui loa i kāu mau wafers. Hana ʻia mai nā mea paʻa a paʻa i ka lepo, pale ia i kāu mau wafers mai ka pōʻino a me ka hoʻohaumia ʻana, e lilo ia i koho kūpono no nā lumi lumi maʻemaʻe. ʻO ka hoʻolālā ʻana o ka cassette e hōʻemi i ka hana ʻana i nā ʻōpala a e hōʻoia i ka paʻa ʻole ʻana o nā wafers i ka wā e lawelawe ai a me ka lawe ʻana.
Hoʻolālā i hoʻonui ʻia no ka hana ʻoi loaʻO SemiceraPākuʻi Semiconductorhiʻona i ka meticulously engineered design e hāʻawi pololei wafer alignment, hoemi i ka pilikia o misalignment a me mechanical poino. Hoʻokaʻawale maikaʻi ʻia nā pahu o ka cassette e paʻa paʻa i kēlā me kēia wafer, e pale ana i ka neʻe ʻana i hiki ke hopena i nā ʻōpala a i ʻole nā hemahema ʻē aʻe.
Versatility a me ka CompatibilityʻO kaPākuʻi SemiconductorHe maʻalahi a kūpono me nā nui wafer like ʻole, kūpono ia no nā pae like ʻole o ka hana semiconductor. Ke hana nei ʻoe me nā ana wafer maʻamau a maʻamau paha, kūpono kēia cassette i kāu mau pono, e hāʻawi ana i ka maʻalahi i kāu kaʻina hana.
Maikaʻi ka lawelawe ʻana a me ka ponoHoʻolālā ʻia me ka manaʻo o ka mea hoʻohana, kaʻO Semicera Semiconductor Cassettehe māmā a maʻalahi hoʻi e hoʻopaʻa ʻia, e ʻae i ka hoʻouka wikiwiki a me ka maikaʻi. ʻAʻole mālama wale kēia hoʻolālā ergonomic i ka manawa akā hōʻemi pū kekahi i ka hewa o ke kanaka, e hōʻoiaʻiʻo ana i nā hana maʻalahi i loko o kāu keʻena.
Kūlike i nā Kūlana ʻOihanaHōʻoia ʻo Semicera i kaPākuʻi Semiconductorhoʻokō i nā kūlana ʻoihana kiʻekiʻe no ka maikaʻi a me ka hilinaʻi. Hoʻāʻo koʻikoʻi kēlā me kēia cassette e hōʻoia i ka hana mau ʻana ma lalo o nā kūlana koi o ka hana semiconductor. ʻO kēia hoʻolaʻa ʻana i ka maikaʻi e hōʻoia i ka pale mau ʻana o kāu mau wafers, mālama i nā kūlana kiʻekiʻe i koi ʻia i ka ʻoihana.
Nā mea | Paahana | Ka noiʻi | Dummy |
Nā Kūlana Crystal | |||
Polytype | 4H | ||
Ua hewa ka hoʻonohonoho ʻana o ka ʻili | <11-20 >4±0.15° | ||
Nā Kūlana Uila | |||
Dopant | n-ʻano Nitrogen | ||
Kū'ē | 0.015-0.025ohm·cm | ||
Nā Kūlana Mechanical | |||
Anawaena | 150.0±0.2mm | ||
mānoanoa | 350±25 μm | ||
Kūlana pālahalaha mua | [1-100]±5° | ||
Ka lōʻihi pālahalaha mua | 47.5±1.5mm | ||
palahalaha lua | ʻAʻohe | ||
TTV | ≤5 μm | ≤10 μm | ≤15 μm |
LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
Kakaka | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
Warp | ≤35 μm | ≤45 μm | ≤55 μm |
'Oka (AFM) mua (Si-maka) | Ra≤0.2nm (5μm*5μm) | ||
Hoʻolālā | |||
Micropipe mānoanoa | <1 ea/cm2 | <10 ea/cm2 | <15 ea/cm2 |
Metala haumia | ≤5E10atoms/cm2 | NA | |
BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
ʻAno o mua | |||
Imua | Si | ||
Hoʻopau ʻili | Si-maka CMP | ||
Nā ʻāpana | ≤60ea/wafer (nui≥0.3μm) | NA | |
Nā ʻōpala | ≤5ea/mm. Ka lōʻihi huila ≤Diameter | ʻO ka lōʻihi huila≤2*Diameter | NA |
ʻAlani ʻili/mau lua/ʻeleʻele/striations/ māwae/contamination | ʻAʻohe | NA | |
Nā ʻāpana lihi/indents/fracture/papa hex | ʻAʻohe | ||
Nā wahi polytype | ʻAʻohe | ʻĀpana huila≤20% | ʻĀpana huila≤30% |
Hōʻailona laser mua | ʻAʻohe | ||
ʻAno o hope | |||
Hoʻopau hope | C-maka CMP | ||
Nā ʻōpala | ≤5ea / mm, Ka lōʻihi huila≤2 * Anawaena | NA | |
Nā pōʻino hope (nā ʻāpana lihi/indents) | ʻAʻohe | ||
ʻōkalakala kua | Ra≤0.2nm (5μm*5μm) | ||
Hōʻailona laser hope | 1 mm (mai ka lihi luna) | ||
Kaulana | |||
Kaulana | Chamfer | ||
Hoʻopili ʻia | |||
Hoʻopili ʻia | Epi-mākaukau me ka hoʻopaʻa ʻumeke Puke cassette nui-wafer | ||
*Nā memo: "NA" ʻo ia hoʻi, ʻaʻohe noi ʻO nā mea i ʻōlelo ʻole ʻia e pili ana i SEMI-STD. |