Semicerahoʻolauna i kona kūlana kiʻekiʻeʻO Epitaxynā lawelawe, i hoʻolālā ʻia e hoʻokō i nā kūlana kūpono o ka ʻoihana semiconductor o kēia lā. He mea koʻikoʻi nā papa silicon Epitaxial no ka hana a me ka hilinaʻi o nā mea uila, a ʻo kā mākou Si Epitaxy solutions e hōʻoia i ka loaʻa ʻana o kāu mau ʻāpana i ka hana maikaʻi loa.
ʻO nā ʻāpana Silika i ulu pono Semiceraʻike ʻo ia ke kumu o nā mea hana kiʻekiʻe i ka maikaʻi o nā mea i hoʻohana ʻia. ʻO kā mākouʻO EpitaxyHoʻoponopono maikaʻi ʻia ke kaʻina hana e hana i nā ʻāpana silika me ka ʻokoʻa like ʻole a me ka pololei aniani. Pono kēia mau papa no nā noi mai ka microelectronics a hiki i nā mana mana kiʻekiʻe, kahi mea nui ka paʻa a me ka hilinaʻi.
Hoʻonui ʻia no ka hana ʻana o ka hāmeʻaʻO kaʻO Epitaxynā lawelawe i hāʻawi ʻia e Semicera e hoʻomaikaʻi i nā waiwai uila o kāu mau polokalamu. Ma ka hoʻoulu ʻana i nā papa silika maʻemaʻe kiʻekiʻe me nā haʻahaʻa haʻahaʻa haʻahaʻa, hōʻoia mākou i ka hana maikaʻi o kāu mau ʻāpana, me ka hoʻomaikaʻi ʻana i ka neʻe ʻana a me ka hoʻemi ʻana i ka pale uila. He mea koʻikoʻi kēia loiloi no ka hoʻokō ʻana i nā hiʻohiʻona kiʻekiʻe a me nā hiʻohiʻona kiʻekiʻe i koi ʻia e ka ʻenehana hou.
Versatility i nā noi Semicera'sʻO EpitaxyHe kūpono ia no ka nui o nā noi, me ka hana ʻana i nā transistors CMOS, nā MOSFET mana, a me nā transistors junction bipolar. Hiki i kā mākou kaʻina hana maʻalahi ke hana maʻamau e pili ana i nā koi kikoʻī o kāu papahana, inā paha ʻoe e makemake i nā ʻāpana lahilahi no nā noi kiʻekiʻe a i ʻole nā papa mānoanoa no nā mea mana.
ʻOi aku ka maikaʻi o ka waiwaiAia ka maikaʻi ma ka puʻuwai o nā mea a pau a mākou e hana ai ma Semicera. ʻO kā mākouʻO Epitaxyke hoʻohana nei ke kaʻina hana i nā mea hana a me nā ʻenehana hou e hōʻoia i ka hoʻokō ʻana o kēlā me kēia papa silicon i nā kūlana kiʻekiʻe o ka maʻemaʻe a me ka pono o ka hoʻolālā. ʻO kēia nānā i nā kikoʻī e hōʻemi i ka hiki ʻana mai o nā hemahema i hiki ke hoʻopilikia i ka hana ʻana o ka hāmeʻa, ka hopena i nā mea hilinaʻi a lōʻihi.
Hoʻoholo i ka hana hou Semiceraua kūpaʻa ʻo ia e noho ma ke alo o ka ʻenehana semiconductor. ʻO kā mākouʻO EpitaxyHōʻike nā lawelawe i kēia kūpaʻa, e hoʻopili ana i nā holomua hou loa i nā ʻenehana ulu epitaxial. Hoʻomaʻamaʻa mau mākou i kā mākou mau kaʻina hana no ka hoʻopuka ʻana i nā papa silika e kū ana i nā pono e ulu nei o ka ʻoihana, e hōʻoia ana i ka hoʻokūkū ʻana o kāu huahana i ka mākeke.
Nā Haʻina Hana Hana no kāu PonoʻO ka hoʻomaopopo ʻana he ʻokoʻa kēlā me kēia papahana,Semicerahāʻawi maʻamauʻO Epitaxynā hāʻina e kūlike i kāu mau pono kikoʻī. Inā makemake ʻoe i nā profile doping kūikawā, ka mānoanoa o ka papa, a i ʻole ka hoʻopau ʻana o ka ʻili, hana pū kā mākou hui me ʻoe e hāʻawi i kahi huahana i kūpono i kāu kikoʻī kikoʻī.
Nā mea | Paahana | Ka noiʻi | Dummy |
Nā Kūlana Crystal | |||
Polytype | 4H | ||
Ua hewa ka hoʻonohonoho ʻana o ka ʻili | <11-20 >4±0.15° | ||
Nā Kūlana Uila | |||
Dopant | n-ʻano Nitrogen | ||
Kū'ē | 0.015-0.025ohm·cm | ||
Nā Kūlana Mechanical | |||
Anawaena | 150.0±0.2mm | ||
mānoanoa | 350±25 μm | ||
Kūlana pālahalaha mua | [1-100]±5° | ||
Ka lōʻihi pālahalaha mua | 47.5±1.5mm | ||
palahalaha lua | ʻAʻohe | ||
TTV | ≤5 μm | ≤10 μm | ≤15 μm |
LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
Kakaka | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
Warp | ≤35 μm | ≤45 μm | ≤55 μm |
'Oka (AFM) mua (Si-maka) | Ra≤0.2nm (5μm*5μm) | ||
Hoʻolālā | |||
Micropipe mānoanoa | <1 ea/cm2 | <10 ea/cm2 | <15 ea/cm2 |
Metala haumia | ≤5E10atoms/cm2 | NA | |
BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
ʻAno o mua | |||
Imua | Si | ||
Hoʻopau ʻili | Si-maka CMP | ||
Nā ʻāpana | ≤60ea/wafer (nui≥0.3μm) | NA | |
Nā ʻōpala | ≤5ea/mm. Ka lōʻihi huila ≤Diameter | ʻO ka lōʻihi huila≤2*Diameter | NA |
ʻAlani ʻili/mau lua/ʻeleʻele/striations/ māwae/contamination | ʻAʻohe | NA | |
Nā ʻāpana lihi/indents/fracture/papa hex | ʻAʻohe | ||
Nā wahi polytype | ʻAʻohe | ʻĀpana huila≤20% | ʻĀpana huila≤30% |
Hōʻailona laser mua | ʻAʻohe | ||
ʻAno o hope | |||
Hoʻopau hope | C-maka CMP | ||
Nā ʻōpala | ≤5ea / mm, Ka lōʻihi huila≤2 * Anawaena | NA | |
Nā pōʻino hope (nā ʻāpana lihi/indents) | ʻAʻohe | ||
ʻōkalakala kua | Ra≤0.2nm (5μm*5μm) | ||
Hōʻailona laser hope | 1 mm (mai ka lihi luna) | ||
Kaulana | |||
Kaulana | Chamfer | ||
Hoʻopili ʻia | |||
Hoʻopili ʻia | Epi-mākaukau me ka hoʻopaʻa ʻumeke Puke cassette nui-wafer | ||
*Nā memo: "NA" ʻo ia hoʻi, ʻaʻohe noi ʻO nā mea i ʻōlelo ʻole ʻia e pili ana i SEMI-STD. |