ʻO SiC Coated Graphite Base Susceptors no MOCVD

Nā Susceptors Base Graphite Coated SiCno ka MOCVD mai semicera ua hana ʻia e hāʻawi i ka hana ʻokoʻa i nā kaʻina ulu epitaxial. ʻO ke kiʻekiʻe kiʻekiʻe o ka silicon carbide coating ma ke kumu graphite e hōʻoiaʻiʻo i ka paʻa, ka lōʻihi, a me ka conductivity thermal maikaʻi loa i ka wā MOCVD (Metal Organic Chemical Vapor Deposition). Ma ka hoʻohana ʻana i ka ʻenehana susceptor hou a semicera, hiki iā ʻoe ke hoʻokō i ka pololei a me ka pono i hoʻonui ʻiaʻO EpitaxyaSiC Epitaxynā noi.

ʻO kēia mau meaMOCVD Susceptorsua hoʻolālā ʻia e kākoʻo i nā ʻāpana semiconductor pono, e like mePSS Etching Carrier, ICP Etching Carrier, aRTP lawe lawe, hoʻolilo iā lākou i mea maʻalahi no nā hana etching a me epitaxial. ʻO ka hoʻokō ʻana o Semicera i nā kūlana kiʻekiʻe e hōʻoia i ka hoʻokō ʻana o kēia mau susceptors i nā koi ikaika o ka hana semiconductor hou.

Kūpono no ka hoʻohana ʻana maLED EpitaxialSusceptor, Barrel Susceptor, a me Monocrystalline Silicon nā kaʻina hana, hiki ke hoʻopilikino ʻia kēia mau susceptors no nā ʻano wafer like ʻole, me nā hoʻonohonoho Pancake Susceptor. He mea maikaʻi loa lākou i ka lawelawe ʻana i nā ʻāpana Photovoltaic, e hana ana iā lākou i mea koʻikoʻi i ka hoʻomohala ʻana i nā cell solar.

Eia kekahi, ʻo SiC Coated Graphite Base Susceptors no MOCVD i hoʻopaʻa ʻia no GaN ma SiC Epitaxy, e hāʻawi ana i ka hoʻohālikelike kiʻekiʻe me nā mea semiconductor kiʻekiʻe. Inā ʻoe e noʻonoʻo ana i ka hoʻomaikaʻi ʻana i nā hua a i ʻole ka hoʻonui ʻana i ka maikaʻi o ka ulu ʻana o ka epitaxial, hāʻawi nā susceptors semicera i ka hilinaʻi a me ka hana e pono ai no ka kūleʻa i nā ʻoihana kiʻekiʻe.