SiC Coating Graphite Wafer Susceptor

ʻO ka wehewehe pōkole:

Hāʻawi ʻo Semicera Semiconductor's SiC Coating Graphite Wafer Susceptor i ka hana wela a me ka lōʻihi no ka hana wafer. E hilinaʻi ma Semicera no nā susceptors kiʻekiʻe SiC-coated i hoʻolālā ʻia e hoʻonui i ka pono a me ka hilinaʻi i nā noi semiconductor.

E hoʻouna i ka leka uila iā mākou

Huahana Huahana

wehewehe

Hana ʻia ʻo Semicorex's SiC Wafer Susceptors no MOCVD (Metal-Organic Chemical Vapor Deposition) e hoʻokō i nā koi koi o nā kaʻina hana epitaxial deposition. Ke hoʻohana nei i ka Silicon Carbide (SiC) kiʻekiʻe kiʻekiʻe, hāʻawi kēia mau susceptors i ka lōʻihi like ʻole a me ka hana ʻana i nā ʻenehana kiʻekiʻe a me nā corrosive, e hōʻoiaʻiʻo ana i ka ulu pololei a me ka maikaʻi o nā mea semiconductor.

Nā mea nui:

1. Na Waiwai Mea KiekieHoʻokumu ʻia mai ka SiC kiʻekiʻe, hōʻike kā mākou wafer susceptors i ka conductivity thermal kūikawā a me ke kūpaʻa kemika. Hiki i kēia mau waiwai ke kū i nā kūlana koʻikoʻi o nā kaʻina MOCVD, me nā mahana kiʻekiʻe a me nā kinoea corrosive, e hōʻoiaʻiʻo ana i ka lōʻihi a me ka hana hilinaʻi.

2. Pono i ka Epitaxial DepositionʻO ka ʻenekinia pololei o kā mākou SiC Wafer Susceptors e hōʻoia i ka hāʻawi like ʻana o ka mahana ma waena o ka ʻili wafer, e hoʻoikaika i ka ulu ʻana o ka papa epitaxial kiʻekiʻe. He mea koʻikoʻi kēia pololei no ka hana ʻana i nā semiconductor me nā waiwai uila maikaʻi loa.

3. Hoʻonui i ka lōʻihiHāʻawi ka mea ikaika ʻo SiC i ke kūpaʻa maikaʻi loa i ka ʻaʻahu a me ka hōʻino ʻana, ʻoiai ma lalo o ka hoʻomau mau ʻana i nā kaʻina hana paʻakikī. Hoʻemi kēia paʻa i ke alapine o ka hoʻololi ʻana i ka susceptor, e hōʻemi ana i ka downtime a me nā koina hana.