Nā mea lawe kalaiwa kalapona i uhi ʻia i ka silikoni

Nā Kiʻi Hōʻikeʻike ʻia ʻo Silicon Carbide Coated Graphite Wafer Carriers

ʻO ka wehewehe pōkole:

Hāʻawi ʻo Semicera Semiconductor's Silicon Carbide Coated Graphite Wafer Carriers i ka ikaika a me ka paʻa wela no ka lawelawe ʻana i ka wafer. E koho iā Semicera no nā mea lawe hana kiʻekiʻe me ka ʻenehana hoʻopili SiC kiʻekiʻe, e hōʻoiaʻiʻo ana i ka lōʻihi o ka lōʻihi a me ka pono i nā noi semiconductor.

E hoʻouna i ka leka uila iā mākou

Huahana Huahana

wehewehe

Hāʻawi ka Semicorex Wafer Carriers me SiC Coating i ke kūpaʻa wela a me ka conductivity, e hōʻoia ana i ka hāʻawi ʻana o ka wela i ka wā o nā kaʻina CVD, koʻikoʻi no nā kiʻi ʻoniʻoni kiʻekiʻe a me nā hiʻohiʻona uhi.

Nā mea nui:

1. Kūʻokoʻa Thermal Kūlana a me ka ConductivityʻOi aku ka maikaʻi o kā mākou mea lawe wafer SiC-coated i ka mālama ʻana i nā mahana kūpaʻa a paʻa, koʻikoʻi no nā kaʻina CVD. Mālama kēia i ka hāʻawi ʻana i ka wela, e alakaʻi ana i ke kiʻi ʻoniʻoni lahilahi a me ka maikaʻi o ka uhi.

2. Hana pololeiHana ʻia kēlā me kēia mea lawe wafer e like me nā kūlana kūpono, e hōʻoia ana i ka mānoanoa like ʻole a me ka maʻalahi o ka ʻili. He mea koʻikoʻi kēia kikoʻī no ka loaʻa ʻana o nā helu deposition mau a me nā waiwai kiʻiʻoniʻoni ma waena o nā wafers he nui, e hoʻonui ai i ka maikaʻi o ka hana holoʻokoʻa.

3. Pale haumiaHana ʻia ka uhi SiC ma ke ʻano he pale impermeable, e pale ana i ka laha ʻana o nā haumia mai ka susceptor i loko o ka wafer. Hoʻemi kēia i nā pōʻino contamination, he mea koʻikoʻi no ka hana ʻana i nā mea semiconductor maʻemaʻe kiʻekiʻe.

4. Ka lōʻihi a me ka maikaʻi o ke kumukūʻaiHoʻonui ka hana paʻa a me ka uhi SiC i ka lōʻihi o nā mea lawe wafer, e hōʻemi ana i ke alapine o nā pani pani susceptor. Ke alakaʻi nei kēia i ka hoʻohaʻahaʻa i nā kumukūʻai mālama a me ka hoʻohaʻahaʻa ʻana i ka downtime, e hoʻonui ana i ka pono o nā hana hana semiconductor.

5. Nā koho hoʻopilikinoHiki ke hoʻopilikino ʻia ʻo Semicorex Wafer Carriers me SiC Coating e hoʻokō i nā koi kaʻina hana, me nā ʻano like ʻole o ka nui, ke ʻano, a me ka mānoanoa o ka uhi. ʻO kēia maʻalahi e hiki ai i ka optimization o ka susceptor e kūlike i nā koi kūikawā o nā kaʻina hana semiconductor. Hiki i nā koho hoʻopilikino ke hoʻomohala i nā hoʻolālā susceptor i hoʻohālikelike ʻia no nā noi kūikawā, e like me ka hana kiʻekiʻe a i ʻole ka noiʻi a me ka hoʻomohala ʻana, e hōʻoia ana i ka hana maikaʻi loa no nā hihia hoʻohana kikoʻī.