ʻO Silicon Nitride Ceramic Substrate

ʻO ka wehewehe pōkole:

Hāʻawi ʻo Semicera's Silicon Nitride Ceramic Substrate i ka conductivity thermal a me ka ikaika mechanical kiʻekiʻe no ke koi ʻana i nā noi uila. Hoʻolālā ʻia no ka hilinaʻi a me ka pono, kūpono kēia mau substrate no nā mea mana kiʻekiʻe a me nā alapine kiʻekiʻe. E hilinaʻi iā Semicera no ka hana ʻoi aku ka maikaʻi ma ka ʻenehana substrate seramika.


Huahana Huahana

Huahana Huahana

Hōʻike ka Semicera's Silicon Nitride Ceramic Substrate i ke kiʻekiʻe o ka ʻenehana waiwai kiʻekiʻe, e hāʻawi ana i ka conductivity thermal kūikawā a me nā waiwai mechanical ikaika. Hoʻolālā ʻia no nā noi hana kiʻekiʻe, ʻoi aku kēia substrate i nā kaiapuni e koi ana i ka hoʻokele wela hilinaʻi a me ka pololei o ke kūkulu ʻana.

Hoʻolālā ʻia kā mākou Silicon Nitride Ceramic Substrates e pale aku i nā mahana wela a me nā kūlana paʻakikī, e hoʻolilo iā lākou i mea kūpono no nā mea uila uila kiʻekiʻe a me nā alapine kiʻekiʻe. ʻO kā lākou mau mea wela wela e hōʻoia i ka hoʻopau ʻana o ka wela, he mea nui ia no ka mālama ʻana i ka hana a me ka lōʻihi o nā mea uila.

ʻIke ʻia ko Semicera kūpaʻa i ka maikaʻi ma kēlā me kēia Silicon Nitride Ceramic Substrate a mākou e hana ai. Hana ʻia kēlā me kēia substrate me ka hoʻohana ʻana i nā kaʻina hana hou e hōʻoia i ka hana mau a me nā hemahema liʻiliʻi. Ke kākoʻo nei kēia pae kiʻekiʻe o ka pololei i nā koi koʻikoʻi o nā ʻoihana e like me ka automotive, aerospace, a me ke kelepona.

Ma waho aʻe o kā lākou mau pono wela a me ka mīkini, hāʻawi kā mākou substrates i nā waiwai insulation uila maikaʻi loa, e kōkua ana i ka hilinaʻi holoʻokoʻa o kāu mau mea uila. Ma ka hōʻemi ʻana i ka hoʻopili uila a me ka hoʻomaikaʻi ʻana i ka paʻa o nā mea, Semicera's Silicon Nitride Ceramic Substrates he hana koʻikoʻi i ka hoʻomaikaʻi ʻana i ka hana o ka hāmeʻa.

ʻO ke koho ʻana i kā Semicera's Silicon Nitride Ceramic Substrate ʻo ia hoʻi ka hoʻopukapuka ʻana i kahi huahana e hāʻawi i ka hana kiʻekiʻe a me ka lōʻihi. Hoʻolālā ʻia kā mākou mau substrate e hoʻokō i nā pono o nā noi uila holomua, e hōʻoia ana e pōmaikaʻi kāu mau polokalamu mai ka ʻenehana mea ʻokiʻoki a me ka hilinaʻi kūʻokoʻa.

Nā mea

Paahana

Ka noiʻi

Dummy

Nā Kūlana Crystal

Polytype

4H

Ua hewa ka hoʻonohonoho ʻana o ka ʻili

<11-20 >4±0.15°

Nā Kūlana Uila

Dopant

n-ʻano Nitrogen

Kū'ē

0.015-0.025ohm·cm

Nā Kūlana Mechanical

Anawaena

150.0±0.2mm

mānoanoa

350±25 μm

Kūlana pālahalaha mua

[1-100]±5°

Ka lōʻihi pālahalaha mua

47.5±1.5mm

palahalaha lua

ʻAʻohe

TTV

≤5 μm

≤10 μm

≤15 μm

LTV

≤3 μm(5mm*5mm)

≤5 μm(5mm*5mm)

≤10 μm(5mm*5mm)

Kakaka

-15μm ~ 15μm

-35μm ~ 35μm

-45μm ~ 45μm

Warp

≤35 μm

≤45 μm

≤55 μm

'Oka (AFM) mua (Si-maka)

Ra≤0.2nm (5μm*5μm)

Hoʻolālā

Micropipe mānoanoa

<1 ea/cm2

<10 ea/cm2

<15 ea/cm2

Metala haumia

≤5E10atoms/cm2

NA

BPD

≤1500 ea/cm2

≤3000 ea/cm2

NA

TSD

≤500 ea/cm2

≤1000 ea/cm2

NA

ʻAno o mua

Imua

Si

Hoʻopau ʻili

Si-maka CMP

Nā ʻāpana

≤60ea/wafer (nui≥0.3μm)

NA

Nā ʻōpala

≤5ea/mm. Ka lōʻihi huila ≤Diameter

ʻO ka lōʻihi huila≤2*Diameter

NA

ʻAlani ʻili/mau lua/ʻeleʻele/striations/ māwae/contamination

ʻAʻohe

NA

Nā ʻāpana lihi/indents/fracture/papa hex

ʻAʻohe

Nā wahi polytype

ʻAʻohe

ʻĀpana huila≤20%

ʻĀpana huila≤30%

Hōʻailona laser mua

ʻAʻohe

ʻAno o hope

Hoʻopau hope

C-maka CMP

Nā ʻōpala

≤5ea / mm, Ka lōʻihi huila≤2 * Anawaena

NA

Nā hemahema o hope (nā ʻāpana lihi/indents)

ʻAʻohe

ʻōkalakala kua

Ra≤0.2nm (5μm*5μm)

Hōʻailona laser hope

1 mm (mai ka lihi luna)

Kaulana

Kaulana

Chamfer

Hoʻopili ʻia

Hoʻopili ʻia

Epi-mākaukau me ka hoʻopaʻa ʻumeke

Puke cassette nui-wafer

*Nā memo: "NA" ʻo ia hoʻi, ʻaʻohe noi ʻO nā mea i ʻōlelo ʻole ʻia e pili ana i SEMI-STD.

tech_1_2_size
SiC wafers

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