Hōʻike ka Semicera's Silicon Nitride Ceramic Substrate i ke kiʻekiʻe o ka ʻenehana waiwai kiʻekiʻe, e hāʻawi ana i ka conductivity thermal kūikawā a me nā waiwai mechanical ikaika. Hoʻolālā ʻia no nā noi hana kiʻekiʻe, ʻoi aku kēia substrate i nā kaiapuni e koi ana i ka hoʻokele wela hilinaʻi a me ka pololei o ke kūkulu ʻana.
Hoʻolālā ʻia kā mākou Silicon Nitride Ceramic Substrates e pale aku i nā mahana wela a me nā kūlana paʻakikī, e hoʻolilo iā lākou i mea kūpono no nā mea uila uila kiʻekiʻe a me nā alapine kiʻekiʻe. ʻO kā lākou mau mea wela wela e hōʻoia i ka hoʻopau ʻana o ka wela, he mea nui ia no ka mālama ʻana i ka hana a me ka lōʻihi o nā mea uila.
ʻIke ʻia ko Semicera kūpaʻa i ka maikaʻi ma kēlā me kēia Silicon Nitride Ceramic Substrate a mākou e hana ai. Hana ʻia kēlā me kēia substrate me ka hoʻohana ʻana i nā kaʻina hana hou e hōʻoia i ka hana mau a me nā hemahema liʻiliʻi. Ke kākoʻo nei kēia pae kiʻekiʻe o ka pololei i nā koi koʻikoʻi o nā ʻoihana e like me ka automotive, aerospace, a me ke kelepona.
Ma waho aʻe o kā lākou mau pono wela a me ka mīkini, hāʻawi kā mākou substrates i nā waiwai insulation uila maikaʻi loa, e kōkua ana i ka hilinaʻi holoʻokoʻa o kāu mau mea uila. Ma ka hōʻemi ʻana i ka hoʻopili uila a me ka hoʻomaikaʻi ʻana i ka paʻa o nā mea, Semicera's Silicon Nitride Ceramic Substrates he hana koʻikoʻi i ka hoʻomaikaʻi ʻana i ka hana o ka hāmeʻa.
ʻO ke koho ʻana i kā Semicera's Silicon Nitride Ceramic Substrate ʻo ia hoʻi ka hoʻopukapuka ʻana i kahi huahana e hāʻawi i ka hana kiʻekiʻe a me ka lōʻihi. Hoʻolālā ʻia kā mākou mau substrate e hoʻokō i nā pono o nā noi uila holomua, e hōʻoia ana e pōmaikaʻi kāu mau polokalamu mai ka ʻenehana mea ʻokiʻoki a me ka hilinaʻi kūʻokoʻa.
Nā mea | Paahana | Ka noiʻi | Dummy |
Nā Kūlana Crystal | |||
Polytype | 4H | ||
Ua hewa ka hoʻonohonoho ʻana o ka ʻili | <11-20 >4±0.15° | ||
Nā Kūlana Uila | |||
Dopant | n-ʻano Nitrogen | ||
Kū'ē | 0.015-0.025ohm·cm | ||
Nā Kūlana Mechanical | |||
Anawaena | 150.0±0.2mm | ||
mānoanoa | 350±25 μm | ||
Kūlana pālahalaha mua | [1-100]±5° | ||
Ka lōʻihi pālahalaha mua | 47.5±1.5mm | ||
palahalaha lua | ʻAʻohe | ||
TTV | ≤5 μm | ≤10 μm | ≤15 μm |
LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
Kakaka | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
Warp | ≤35 μm | ≤45 μm | ≤55 μm |
'Oka (AFM) mua (Si-maka) | Ra≤0.2nm (5μm*5μm) | ||
Hoʻolālā | |||
Micropipe mānoanoa | <1 ea/cm2 | <10 ea/cm2 | <15 ea/cm2 |
Metala haumia | ≤5E10atoms/cm2 | NA | |
BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
ʻAno o mua | |||
Imua | Si | ||
Hoʻopau ʻili | Si-maka CMP | ||
Nā ʻāpana | ≤60ea/wafer (nui≥0.3μm) | NA | |
Nā ʻōpala | ≤5ea/mm. Ka lōʻihi huila ≤Diameter | ʻO ka lōʻihi huila≤2*Diameter | NA |
ʻAlani ʻili/mau lua/ʻeleʻele/striations/ māwae/contamination | ʻAʻohe | NA | |
Nā ʻāpana lihi/indents/fracture/papa hex | ʻAʻohe | ||
Nā wahi polytype | ʻAʻohe | ʻĀpana huila≤20% | ʻĀpana huila≤30% |
Hōʻailona laser mua | ʻAʻohe | ||
ʻAno o hope | |||
Hoʻopau hope | C-maka CMP | ||
Nā ʻōpala | ≤5ea / mm, Ka lōʻihi huila≤2 * Anawaena | NA | |
Nā hemahema o hope (nā ʻāpana lihi/indents) | ʻAʻohe | ||
ʻōkalakala kua | Ra≤0.2nm (5μm*5μm) | ||
Hōʻailona laser hope | 1 mm (mai ka lihi luna) | ||
Kaulana | |||
Kaulana | Chamfer | ||
Hoʻopili ʻia | |||
Hoʻopili ʻia | Epi-mākaukau me ka hoʻopaʻa ʻumeke Puke cassette nui-wafer | ||
*Nā memo: "NA" ʻo ia hoʻi, ʻaʻohe noi ʻO nā mea i ʻōlelo ʻole ʻia e pili ana i SEMI-STD. |