Silika ma luna o ka insulator wafers

ʻO ka wehewehe pōkole:

Hāʻawi nā wafers Silicon-on-Insulator o Semicera i nā hoʻonā hana kiʻekiʻe no nā noi semiconductor holomua. He kūpono no ka MEMS, sensors, a me microelectronics, hāʻawi kēia mau wafers i kahi kaʻawale uila maikaʻi loa a me ka capacitance parasitic haʻahaʻa. Mālama ʻo Semicera i ka hana pololei, e hāʻawi ana i ka maikaʻi kūlike no nā ʻano ʻenehana hou. Manaʻo mākou e lilo i hoa pili lōʻihi ma Kina.


Huahana Huahana

Huahana Huahana

Silika ma luna o ka insulator wafersmai Semicera ua hoʻolālā ʻia e hoʻokō i ka ulu nui o ka noi no nā hoʻonā semiconductor kiʻekiʻe. Hāʻawi kā mākou wafers SOI i ka hana uila ʻoi aku ka maikaʻi a me ka hoʻohaʻahaʻa ʻana i ka capacitance device parasitic, e hoʻolilo iā lākou i mea kūpono no nā noi holomua e like me nā polokalamu MEMS, sensor, a me nā kaapuni hoʻohui. ʻO ko Semicera akamai i ka hana wafer e hōʻoia i kēlā me kēiaSOI waferhāʻawi i nā hualoaʻa hilinaʻi, kūlana kiʻekiʻe no kāu pono ʻenehana o ka hanauna e hiki mai ana.

ʻO kā mākouSilika ma luna o ka insulator wafershāʻawi i kahi kaulike maikaʻi ma waena o ka uku-pono a me ka hana. Me ka piʻi ʻana o ka hoʻokūkū soi wafer, hoʻohana nui ʻia kēia mau wafers i nā ʻano ʻoihana, me ka microelectronics a me ka optoelectronics. ʻO ke kaʻina hana hana kiʻekiʻe o Semicera e hōʻoiaʻiʻo i ka paʻa ʻana o ka wafer maikaʻi a me ka like ʻole, e kūpono ana iā lākou no nā ʻano noi like ʻole, mai nā wafers SOI cavity a i nā wafer silika maʻamau.

Nā mea nui:

Hoʻolālā ʻia nā wafers SOI kiʻekiʻe no ka hana ma MEMS a me nā noi ʻē aʻe.

ʻO ke kumu kūʻai soi wafer hoʻokūkū no nā ʻoihana e ʻimi nei i nā hoʻonā holomua me ka ʻole e hōʻemi i ka maikaʻi.

He kūpono no nā ʻenehana ʻokiʻoki, hāʻawi i ka hoʻokaʻawale uila i hoʻonui ʻia a me ka maikaʻi ma ke silikona ma nā ʻōnaehana insulator.

ʻO kā mākouSilika ma luna o ka insulator wafersua hoʻolālā ʻia e hāʻawi i nā hāʻina hana kiʻekiʻe, e kākoʻo ana i ka nalu o ka hana hou i ka ʻenehana semiconductor. Inā ʻoe e hana ana ma ka luaSOI wafers, nā mea MEMS, a i ʻole silika ma nā ʻāpana insulator, hāʻawi ʻo Semicera i nā wafers i kūpono i nā kūlana kiʻekiʻe o ka ʻoihana.

Nā mea

Paahana

Ka noiʻi

Dummy

Nā Kūlana Crystal

Polytype

4H

Ua hewa ka hoʻonohonoho ʻana o ka ʻili

<11-20 >4±0.15°

Nā Kūlana Uila

Dopant

n-ʻano Nitrogen

Kū'ē

0.015-0.025ohm·cm

Nā Kūlana Mechanical

Anawaena

150.0±0.2mm

mānoanoa

350±25 μm

Kūlana pālahalaha mua

[1-100]±5°

Ka lōʻihi pālahalaha mua

47.5±1.5mm

palahalaha lua

ʻAʻohe

TTV

≤5 μm

≤10 μm

≤15 μm

LTV

≤3 μm(5mm*5mm)

≤5 μm(5mm*5mm)

≤10 μm(5mm*5mm)

Kakaka

-15μm ~ 15μm

-35μm ~ 35μm

-45μm ~ 45μm

Warp

≤35 μm

≤45 μm

≤55 μm

'Oka (AFM) mua (Si-maka)

Ra≤0.2nm (5μm*5μm)

Hoʻolālā

Micropipe mānoanoa

<1 ea/cm2

<10 ea/cm2

<15 ea/cm2

Metala haumia

≤5E10atoms/cm2

NA

BPD

≤1500 ea/cm2

≤3000 ea/cm2

NA

TSD

≤500 ea/cm2

≤1000 ea/cm2

NA

ʻAno o mua

Imua

Si

Hoʻopau ʻili

Si-maka CMP

Nā ʻāpana

≤60ea/wafer (nui≥0.3μm)

NA

Nā ʻōpala

≤5ea/mm. Ka lōʻihi huila ≤Diameter

ʻO ka lōʻihi huila≤2*Diameter

NA

ʻAlani ʻili/mau lua/ʻeleʻele/striations/ māwae/contamination

ʻAʻohe

NA

Nā ʻāpana lihi/indents/fracture/papa hex

ʻAʻohe

Nā wahi polytype

ʻAʻohe

ʻĀpana huila≤20%

ʻĀpana huila≤30%

Hōʻailona laser mua

ʻAʻohe

ʻAno o hope

Hoʻopau hope

C-maka CMP

Nā ʻōpala

≤5ea / mm, Ka lōʻihi huila≤2 * Anawaena

NA

Nā pōʻino hope (nā ʻāpana lihi/indents)

ʻAʻohe

ʻōkalakala kua

Ra≤0.2nm (5μm*5μm)

Hōʻailona laser hope

1 mm (mai ka lihi luna)

Kaulana

Kaulana

Chamfer

Hoʻopili ʻia

Hoʻopili ʻia

Epi-mākaukau me ka hoʻopaʻa ʻumeke

Puke cassette nui-wafer

*Nā memo: "NA" ʻo ia hoʻi, ʻaʻohe noi ʻO nā mea i ʻōlelo ʻole ʻia e pili ana i SEMI-STD.

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SiC wafers

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