Hana ʻia ʻo Semicera Silicon Wafers e lawelawe ma ke ʻano he kumu no ka nui o nā mea semiconductor, mai nā microprocessors a i nā cell photovoltaic. Hana ʻia kēia mau wafers me ka pololei kiʻekiʻe a me ka maʻemaʻe, e hōʻoia ana i ka hana maikaʻi loa i nā noi uila like ʻole.
Hana ʻia me ka hoʻohana ʻana i nā ʻenehana kiʻekiʻe, hōʻike ʻo Semicera Silicon Wafers i ka palahalaha a me ka like ʻole, he mea koʻikoʻi ia no ka loaʻa ʻana o nā hua kiʻekiʻe i ka hana semiconductor. Kōkua kēia pae o ka pololei i ka hōʻemi ʻana i nā hemahema a me ka hoʻomaikaʻi ʻana i ka pono holoʻokoʻa o nā mea uila.
ʻIke ʻia ka maikaʻi o Semicera Silicon Wafers i kā lākou mau hiʻohiʻona uila, e kōkua ana i ka hoʻomaikaʻi ʻana i ka hana o nā mea semiconductor. Me nā haʻahaʻa haumia haʻahaʻa a me ke ʻano kristal kiʻekiʻe, hāʻawi kēia mau wafers i ke kahua kūpono no ka hoʻomohala ʻana i nā uila hana kiʻekiʻe.
Loaʻa i nā ʻano nui a me nā kikoʻī, hiki ke hoʻopili ʻia ʻo Semicera Silicon Wafers no ka hoʻokō ʻana i nā pono kikoʻī o nā ʻoihana like ʻole, e like me ka computing, telecommunications, a me ka ikehu hou. Inā no ka hana nui a i ʻole ka noiʻi kūikawā, hāʻawi kēia mau wafers i nā hopena hilinaʻi.
Ua kūpaʻa ʻo Semicera i ke kākoʻo ʻana i ka ulu a me ka hana hou o ka ʻoihana semiconductor ma o ka hāʻawi ʻana i nā wafer silika kiʻekiʻe e kū ana i nā kūlana ʻoihana kiʻekiʻe. Me ka nānā ʻana i ka pololei a me ka hilinaʻi, hiki i ka Semicera ke hiki i nā mea hana ke pana i nā palena o ka ʻenehana, e hōʻoiaʻiʻo ana i kā lākou huahana e noho ma ke alo o ka mākeke.
Nā mea | Paahana | Ka noiʻi | Dummy |
Nā Kūlana Crystal | |||
Polytype | 4H | ||
Ua hewa ka hoʻonohonoho ʻana o ka ʻili | <11-20 >4±0.15° | ||
Nā Kūlana Uila | |||
Dopant | n-ʻano Nitrogen | ||
Kū'ē | 0.015-0.025ohm·cm | ||
Nā Kūlana Mechanical | |||
Anawaena | 150.0±0.2mm | ||
mānoanoa | 350±25 μm | ||
Kūlana pālahalaha mua | [1-100]±5° | ||
Ka lōʻihi pālahalaha mua | 47.5±1.5mm | ||
palahalaha lua | ʻAʻohe | ||
TTV | ≤5 μm | ≤10 μm | ≤15 μm |
LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
Kakaka | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
Warp | ≤35 μm | ≤45 μm | ≤55 μm |
'Oka (AFM) mua (Si-maka) | Ra≤0.2nm (5μm*5μm) | ||
Hoʻolālā | |||
Micropipe mānoanoa | <1 ea/cm2 | <10 ea/cm2 | <15 ea/cm2 |
Metala haumia | ≤5E10atoms/cm2 | NA | |
BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
ʻAno o mua | |||
Imua | Si | ||
Hoʻopau ʻili | Si-maka CMP | ||
Nā ʻāpana | ≤60ea/wafer (nui≥0.3μm) | NA | |
Nā ʻōpala | ≤5ea/mm. Ka lōʻihi huila ≤Diameter | ʻO ka lōʻihi huila≤2*Diameter | NA |
ʻAlani ʻili/mau lua/ʻeleʻele/striations/ māwae/contamination | ʻAʻohe | NA | |
Nā ʻāpana lihi/indents/fracture/papa hex | ʻAʻohe | ||
Nā wahi polytype | ʻAʻohe | ʻĀpana huila≤20% | ʻĀpana huila≤30% |
Hōʻailona laser mua | ʻAʻohe | ||
ʻAno o hope | |||
Hoʻopau hope | C-maka CMP | ||
Nā ʻōpala | ≤5ea / mm, Ka lōʻihi huila≤2 * Anawaena | NA | |
Nā pōʻino hope (nā ʻāpana lihi/indents) | ʻAʻohe | ||
ʻōkalakala kua | Ra≤0.2nm (5μm*5μm) | ||
Hōʻailona laser hope | 1 mm (mai ka lihi luna) | ||
Kaulana | |||
Kaulana | Chamfer | ||
Hoʻopili ʻia | |||
Hoʻopili ʻia | Epi-mākaukau me ka hoʻopaʻa ʻumeke Puke cassette nui-wafer | ||
*Nā memo: "NA" ʻo ia hoʻi, ʻaʻohe noi ʻO nā mea i ʻōlelo ʻole ʻia e pili ana i SEMI-STD. |