Hoʻopili ʻia ʻo TaC Coating

Tantalum carbide (TaC)mea he super-kiʻekiʻe wela e kū'ē i ka ceramic mea me ka pono o kiʻekiʻe hehee ai wahi, kiʻekiʻe paakiki, maikai kemika paʻa, ikaika uila a me ka thermal conductivity, etc.ka uhi ʻana o TaChiki ke hoʻohana ʻia e like me ka ablation-resistant coating, oxidation-resistant coating, a me ka lole pale pale, a hoʻohana nui ʻia i ka pale wela aerospace, ke kolu o ka hanauna semiconductor hoʻokahi kristal ulu, ikehu uila a me nā kula ʻē aʻe.

 

Kaʻina hana:

Tantalum carbide (TaC)He ʻano ʻano mea hana seramika ultra-kiʻekiʻe me ka maikaʻi o ka helu heheʻe kiʻekiʻe, ka paʻakikī kiʻekiʻe, ke kūpaʻa kemika maikaʻi, ka uila ikaika a me ka conductivity thermal. No laila,ka uhi ʻana o TaChiki ke hoʻohana ʻia e like me ka ablation-resistant coating, oxidation-resistant coating, a me ka lole pale pale, a hoʻohana nui ʻia i ka pale wela aerospace, ke kolu o ka hanauna semiconductor hoʻokahi kristal ulu, ikehu uila a me nā kula ʻē aʻe.

ʻO nā hiʻohiʻona koʻikoʻi o nā uhi:

Hoʻohana mākou i ke ʻano slurry-sintering e hoʻomākaukau aiʻO nā pale TaCo nā mānoanoa like ʻole ma nā substrate graphite o nā ʻano nui like ʻole. ʻO ka mua, ua hoʻonohonoho ʻia ka pauka maʻemaʻe kiʻekiʻe me ke kumu Ta a me ke kumu C me ka dispersant a me ka binder e hana i kahi slurry precursor paʻa a paʻa. I ka manawa like, e like me ka nui o nā ʻāpana graphite a me nā koi mānoanoa oka uhi ʻana o TaC, ua hoʻomākaukauʻia ka hoʻopili muaʻana ma o ka pīpīʻana, ka nininiʻana, ka infiltration a me nāʻano'ē aʻe. ʻO ka mea hope loa, ua wela ia ma luna o 2200 ℃ i loko o kahi kaʻawale e hoʻomākaukau ai i kahi ʻano like, paʻa, hoʻokahi-phase, a me ka maikaʻi-crystalline.ka uhi ʻana o TaC.

 
ʻO ka uhi ʻia ʻo Tac Sintered (1)

ʻO nā hiʻohiʻona koʻikoʻi o nā uhi:

ʻO ka mānoanoa oka uhi ʻana o TaCaia ma kahi o 10-50 μm, ulu nā hua i kahi ʻano manuahi, a ua haku ʻia ʻo TaC me kahi hoʻolālā cubic i hoʻohālikelike ʻia i ka maka, me ka ʻole o nā haumia ʻē aʻe; paʻa ka uhi, paʻa ka hale, a kiʻekiʻe ka crystallinity.ka uhi ʻana o TaChiki ke hoʻopiha i nā pores ma ka ʻili o ka graphite, a ua hoʻopaʻa ʻia i ka graphite matrix me ka ikaika hoʻopaʻa kiʻekiʻe. ʻO ka lakio o Ta a C i ka uhi ʻana kokoke i 1:1. ʻO ka GDMS purity detection reference maʻamau ASTM F1593, ʻoi aku ka nui o ka haumia ma mua o 121ppm. ʻO ka helu helu mean deviation (Ra) o ka ʻaoʻao uhi ʻo 662nm.

 
ʻO ka uhi ʻia ʻo Tac Sintered (2)

Nā noi maʻamau:

GaN aSiC epitaxialʻO nā ʻāpana reactor CVD, me nā mea lawe wafer, nā kīʻaha ukali, nā poʻo ʻauʻau, nā uhi o luna a me nā susceptors.

ʻO SiC, GaN a me AlN nā mea ulu kristal, me nā crucibles, nā mea paʻa aniani hua, nā alakaʻi kahe a me nā kānana.

ʻO nā mea ʻenehana, me nā mea hoʻomehana resistive, nā nozzles, nā apo pale a me nā mea hoʻopaʻa paʻa.

Nā hiʻohiʻona nui:

Paʻa wela kiʻekiʻe ma 2600 ℃

Hāʻawi i ka palekana kūlana paʻa i nā wahi kemika koʻikoʻi o H2, NH3, SiH4a me Si mahu

He kūpono no ka hana nui me nā pōkole hana pōkole.

 
Hoʻopili ʻia ʻo Tac coating (4)
ʻO ka uhi ʻia ʻo Tac Sintered (5)
ʻO ka uhi ʻia ʻo Tac Sintered (7)
ʻO ka uhi ʻia ʻo Tac Sintered (6)