SOI Wafer Silicon Ma ka Insulator

ʻO ka wehewehe pōkole:

Hāʻawi ʻo Semicera's SOI Wafer (Silicon On Insulator) i kahi kaʻawale uila a me ka hana no nā noi semiconductor holomua. Hoʻolālā ʻia no ka ʻoi aku ka maikaʻi o ka wela a me ka uila, kūpono kēia mau wafers no nā kaapuni hoʻohui kiʻekiʻe. E koho iā Semicera no ka maikaʻi a me ka hilinaʻi i ka ʻenehana wafer SOI.


Huahana Huahana

Huahana Huahana

Hoʻolālā ʻia ʻo Semicera's SOI Wafer (Silicon On Insulator) e hāʻawi i ka hoʻokaʻawale uila a me ka hana wela. ʻO kēia ʻano wafer hou, e hōʻike ana i kahi papa silika ma kahi papa insulating, e hōʻoia i ka hoʻomaikaʻi ʻana i ka hana o ka mea hana a me ka hoʻemi ʻana i ka hoʻohana ʻana i ka mana, e lilo ia i mea kūpono no nā ʻano noiʻi kiʻekiʻe.

Hāʻawi kā mākou wafers SOI i nā pōmaikaʻi kūikawā no nā kaapuni i hoʻohui ʻia ma o ka hoʻemi ʻana i ka capacitance parasitic a me ka hoʻomaikaʻi ʻana i ka wikiwiki a me ka pono. He mea koʻikoʻi kēia no nā uila uila hou, kahi e pono ai ka hana kiʻekiʻe a me ka ikaika o ka ikehu no nā mea kūʻai aku a me nā noi ʻoihana.

Hoʻohana ʻo Semicera i nā ʻenehana hana kiʻekiʻe e hana i nā wafers SOI me ka maikaʻi a me ka hilinaʻi. Hāʻawi kēia mau wafers i ka insulation thermal maikaʻi loa, e kūpono iā lākou no ka hoʻohana ʻana i nā kaiapuni kahi e hopohopo ai ka wela, e like me nā mea uila uila kiʻekiʻe a me nā ʻōnaehana hoʻokele mana.

ʻO ka hoʻohana ʻana i nā wafers SOI i ka hana semiconductor e hiki ai ke hoʻomohala i nā ʻāpana liʻiliʻi, wikiwiki, a ʻoi aku ka hilinaʻi. ʻO ka hoʻokō ʻana o Semicera i ka ʻenehana kikoʻī e hōʻoia i ko mākou mau wafers SOI e hoʻokō i nā kūlana kiʻekiʻe i koi ʻia no nā ʻenehana ʻokiʻoki i nā kula e like me ke kelepona, kaʻa, a me nā mea uila.

ʻO ke koho ʻana i kā Semicera's SOI Wafer ʻo ia hoʻi ka hoʻopukapuka ʻana i kahi huahana e kākoʻo ana i ka holomua o nā ʻenehana uila a me microelectronic. Hoʻolālā ʻia kā mākou mau wafers e hāʻawi i ka hana i hoʻonui ʻia a me ka lōʻihi, e hāʻawi ana i ka kūleʻa o kāu mau papahana ʻenehana kiʻekiʻe a me ka hōʻoia ʻana e noho ʻoe ma ke alo o ka hana hou.

Nā mea

Paahana

Ka noiʻi

Dummy

Nā Kūlana Crystal

Polytype

4H

Ua hewa ka hoʻonohonoho ʻana o ka ʻili

<11-20 >4±0.15°

Nā Kūlana Uila

Dopant

n-ʻano Nitrogen

Kū'ē

0.015-0.025ohm·cm

Nā Kūlana Mechanical

Anawaena

150.0±0.2mm

mānoanoa

350±25 μm

Kūlana pālahalaha mua

[1-100]±5°

Ka lōʻihi pālahalaha mua

47.5±1.5mm

palahalaha lua

ʻAʻohe

TTV

≤5 μm

≤10 μm

≤15 μm

LTV

≤3 μm(5mm*5mm)

≤5 μm(5mm*5mm)

≤10 μm(5mm*5mm)

Kakaka

-15μm ~ 15μm

-35μm ~ 35μm

-45μm ~ 45μm

Warp

≤35 μm

≤45 μm

≤55 μm

'Oka (AFM) mua (Si-maka)

Ra≤0.2nm (5μm*5μm)

Hoʻolālā

Micropipe mānoanoa

<1 ea/cm2

<10 ea/cm2

<15 ea/cm2

Metala haumia

≤5E10atoms/cm2

NA

BPD

≤1500 ea/cm2

≤3000 ea/cm2

NA

TSD

≤500 ea/cm2

≤1000 ea/cm2

NA

ʻAno o mua

Imua

Si

Hoʻopau ʻili

Si-maka CMP

Nā ʻāpana

≤60ea/wafer (nui≥0.3μm)

NA

Nā ʻōpala

≤5ea/mm. Ka lōʻihi huila ≤Diameter

ʻO ka lōʻihi huila≤2*Diameter

NA

ʻAlani ʻili/mau lua/ʻeleʻele/striations/ māwae/contamination

ʻAʻohe

NA

Nā ʻāpana lihi/indents/fracture/papa hex

ʻAʻohe

Nā wahi polytype

ʻAʻohe

ʻĀpana huila≤20%

ʻĀpana huila≤30%

Hōʻailona laser mua

ʻAʻohe

ʻAno o hope

Hoʻopau hope

C-maka CMP

Nā ʻōpala

≤5ea / mm, Ka lōʻihi huila≤2 * Anawaena

NA

Nā hemahema o hope (nā ʻāpana lihi/indents)

ʻAʻohe

ʻōkalakala kua

Ra≤0.2nm (5μm*5μm)

Hōʻailona laser hope

1 mm (mai ka lihi luna)

Kaulana

Kaulana

Chamfer

Hoʻopili ʻia

Hoʻopili ʻia

Epi-mākaukau me ka hoʻopaʻa ʻumeke

Puke cassette nui-wafer

*Nā memo: "NA" ʻo ia hoʻi, ʻaʻohe noi ʻO nā mea i ʻōlelo ʻole ʻia e pili ana i SEMI-STD.

tech_1_2_size
SiC wafers

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