Nā apo alakaʻi graphite i uhi ʻia ʻo TaCe kuhikuhi i ka waiho ʻana o kahi ʻāpana lahilahi otantalum carbidema ka ʻili o ke apo alakaʻi graphite e hoʻomaikaʻi i kona pale ʻana i ka ʻaʻahu, ka pale wela kiʻekiʻe a me ke kūpaʻa kemika. Hoʻokumu pinepine ʻia kēia uhi ma ka ʻili o kahi apo alakaʻi graphite e nā ʻenehana e like me ka hoʻoheheʻe ʻana i ka mahu kino (PVD) a i ʻole ka hoʻoheheʻe ʻana i ka mahu (CVD).
Hāʻawi ʻo Semicera i nā ʻāpana tantalum carbide (TaC) kūikawā no nā ʻāpana like ʻole a me nā mea lawe.ʻO ke kaʻina hana hoʻopili alakaʻi Semicera e hiki ai i ka tantalum carbide (TaC) ke hoʻokō i ka maʻemaʻe kiʻekiʻe, ke kūpaʻa wela kiʻekiʻe a me ka hoʻomanawanui kiʻekiʻe, e hoʻomaikaʻi i ka maikaʻi o ka huahana o nā kristal SIC / GAN a me nā papa EPI (Kāpena ʻo TaC i uhi ʻia i ka graphite), a hoʻonui i ke ola o nā ʻāpana reactor koʻikoʻi. ʻO ka hoʻohana ʻana i ka tantalum carbide TaC coating ka mea e hoʻoponopono ai i ka pilikia lihi a hoʻomaikaʻi i ka maikaʻi o ka ulu ʻana o ke aniani, a ua hoʻopau ʻo Semicera i ka ʻenehana tantalum carbide coating (CVD), a hiki i ka pae kiʻekiʻe honua.
Ma hope o nā makahiki o ka hoʻomohala ʻana, ua lanakila ʻo Semicera i ka ʻenehana oCVD TaCme ka hooikaika pu ana o ka oihana R&D. He mea maʻalahi nā hemahema i ka ulu ʻana o nā wafers SiC, akā ma hope o ka hoʻohana ʻanaTaC, nui ka ʻokoʻa. Ma lalo iho nei ka hoʻohālikelike ʻana o nā wafers me ka TaC a me ka ʻole o TaC, a me nā ʻāpana ʻo Simicera 'no ka ulu aniani hoʻokahi.
ʻO nā hiʻohiʻona nui o nā apo alakaʻi graphite i uhi ʻia ʻo TaC:
1. ʻO ke kūpaʻa wela kiʻekiʻe: ʻO ka uhi ʻana o TaC i kahi kūlana kiʻekiʻe kiʻekiʻe kiʻekiʻe a hiki ke mālama i ke kūpaʻa ma nā wahi wela kiʻekiʻe.
2. Wear resistance: ʻO ka paʻakikī kiʻekiʻe o ka tantalum carbide thin layer e hāʻawi i ke apo alakaʻi i ke kūpaʻa maikaʻi a hoʻonui i kona ola lawelawe.
3. Paʻa kemika: He kūpaʻa kiʻekiʻe ka uhi ʻana o TaC e kūʻē i ka corrosion kemika, kūpono ia no nā noi ma kekahi mau mea hoʻoheheʻe.
4. E ho'ēmi i ka friction: Hiki i ka uhi TaC ke hoʻemi pono i ka friction ma waena o ke apo alakaʻi graphite a me nā mea'ē aʻe a hoʻonui i ka pono o nā sila mechanical.
me ka TaC ole
Ma hope o ka hoʻohana ʻana iā TaC (ʻākau)
Eia kekahi, ʻo SemiceraNā huahana i uhi ʻia e TaChōʻike i kahi ola lawelawe lōʻihi a ʻoi aku ka nui o ke kūpaʻa wela kiʻekiʻe i hoʻohālikelike ʻia meʻO nā uhi SiC.Ua hōʻike ʻia nā ana Laboratory i kā mākouʻO nā pale TaChiki ke hana mau i ka wela a hiki i 2300 degere Celsius no nā manawa lōʻihi. Ma lalo iho nei kekahi mau laʻana o kā mākou laʻana.
