ʻO TaC Coated Plate kahi diski kūikawā i hoʻolālā ʻia no ka hoʻohana ʻana i nā kaʻina hana epitaxial SiC, i hana ʻia me ka pololei mai nā mea graphite kiʻekiʻe. Ua uhi ʻia kona ʻili me ka tantalum carbide (TaC), kahi pūhui i ʻike ʻia no kona maʻemaʻe a me ka ikaika. Hoʻonui ka TaC coating i ka lōʻihi o ka pā a me ke kū'ē i nā wela kiʻekiʻe, e kūpono ana ia no nā kūlana koi o nā kaʻina hana epitaxial SiC.
ʻO kēia TaC Coated Plate he diski kūikawā i hoʻolālā ʻia no ka hoʻohana ʻana i nā kaʻina epitaxial SiC, i hana ʻia me ka pololei mai nā mea graphite kiʻekiʻe. Ua uhi ʻia ka ʻili o TaC Coated Plate me ka tantalum carbide (TaC), kahi pūhui i ʻike ʻia no kona maʻemaʻe a me ka ikaika. lawelawe ʻo ia ma ke ʻano he kahua hilinaʻi no ka lawe ʻana i nā wafers i nā manawa like ʻole o ka ulu epitaxial SiC. Hāʻawi kāna kumu graphite maʻemaʻe kiʻekiʻe i ka ʻili paʻa a inert, ʻoiai ka uhi ʻana o TaC e hoʻohui i kahi ʻāpana pale ʻē aʻe i nā hopena kemika a me ka lole.
SemikaauHoʻonohonoho ʻia ʻo TaC Coated Plate e like me nā koi kikoʻī o nā mea kūʻai aku, e hōʻoiaʻiʻo ana i ka hana maikaʻi loa a me ka hoʻohālikelike ʻana me kā lākou SiC epitaxial system. ʻO ka nui, ke ʻano, a i ʻole nā kikoʻī ʻē aʻe, ua hana ʻia kēia mau papa e hoʻokō i nā pono kūikawā o kēlā me kēia noi.
me ka TaC ole
Ma hope o ka hoʻohana ʻana iā TaC (ʻākau)
Eia kekahi, ʻo SemiceraNā huahana i uhi ʻia e TaChōʻike i kahi ola lawelawe lōʻihi a ʻoi aku ka nui o ke kūpaʻa wela kiʻekiʻe i hoʻohālikelike ʻia meʻO nā uhi SiC.Ua hōʻike ʻia nā ana Laboratory i kā mākouʻO nā pale TaChiki ke hana mau i ka wela a hiki i 2300 degere Celsius no nā manawa lōʻihi. Aia ma lalo kekahi mau laʻana o kā mākou mau laʻana:
