Hāʻawi ʻo Semicera i nā ʻāpana tantalum carbide (TaC) kūikawā no nā ʻāpana like ʻole a me nā mea lawe.ʻO ke kaʻina hana hoʻopili alakaʻi Semicera e hiki ai i ka tantalum carbide (TaC) ke hoʻokō i ka maʻemaʻe kiʻekiʻe, ke kūpaʻa wela kiʻekiʻe a me ka hoʻomanawanui kiʻekiʻe, e hoʻomaikaʻi i ka maikaʻi o ka huahana o nā kristal SIC / GAN a me nā papa EPI (Kāpena ʻo TaC i uhi ʻia i ka graphite), a hoʻonui i ke ola o nā ʻāpana reactor koʻikoʻi. ʻO ka hoʻohana ʻana i ka tantalum carbide TaC coating ka mea e hoʻoponopono ai i ka pilikia lihi a hoʻomaikaʻi i ka maikaʻi o ka ulu ʻana o ke aniani, a ua hoʻopau ʻo Semicera i ka ʻenehana tantalum carbide coating (CVD), a hiki i ka pae kiʻekiʻe honua.
Hoʻohana nui ʻia nā mea lawe wafer ʻo Tantalum carbide i ka hana wafer a me ka lawelawe ʻana i nā kaʻina hana semiconductor. Hāʻawi lākou i ke kākoʻo paʻa a me ka pale e hōʻoia i ka palekana, pololei a me ke kūlike o nā wafers i ka wā o ka hana. Hiki i ka Tantalum carbide coatings ke hoʻonui i ke ola lawelawe o ka mea lawe, hoʻemi i nā kumukūʻai, a hoʻomaikaʻi i ka maikaʻi a me ka hilinaʻi o nā huahana semiconductor.
ʻO ka wehewehe ʻana o ka tantalum carbide coated wafer carrier penei:
1. Koho waiwai: ʻO ka Tantalum carbide kahi mea me ka hana maikaʻi loa, ka paʻakikī kiʻekiʻe, ka helu heheʻe kiʻekiʻe, ka pale ʻana i ka corrosion a me nā ʻano mechanical maikaʻi loa, no laila ua hoʻohana nui ʻia i ka hana semiconductor.
2. Ka uhi ʻana o ka ʻili: Hoʻopili ʻia ka uhi ʻana o ka Tantalum carbide i ka ʻili o ka mea lawe wafer ma o ke kaʻina hana hoʻopili kūikawā e hana ai i kahi ʻaʻahu tantalum carbide paʻa. Hiki i kēia uhi ke hāʻawi i ka pale hou a me ke kūpaʻa ʻana, ʻoiai e loaʻa ana ka conductivity thermal maikaʻi.
3. Paʻa a me ka pololei: Tantalum carbide coated wafer carrier he kiʻekiʻe o ka palahalaha a me ka pololei, e hōʻoia ana i ka paʻa a me ka pololei o nā wafers i ka wā o ka hanaʻana. He mea koʻikoʻi ka palahalaha a me ka pau ʻana o ka ʻili o ka mea lawe e hōʻoia i ka maikaʻi a me ka hana o ka wafer.
4. Paʻa wela: Hiki i nā mea lawe wafer uhi ʻia ʻo Tantalum carbide ke hoʻomau i ke kūpaʻa i nā wahi wela kiʻekiʻe me ka ʻole o ka deformation a i ʻole ka wehe ʻana, e hōʻoiaʻiʻo ana i ke kūpaʻa a me ke kūpaʻa ʻana o nā wafers i nā kaʻina hana kiʻekiʻe.
5. ʻO ke kūpaʻa ʻana o ka corrosion: Loaʻa i ka Tantalum carbide coatings ke kūpaʻa maikaʻi loa, hiki ke pale aku i ka hoʻoneʻe ʻana o nā kinikona a me nā mea hoʻoheheʻe, a pale i ka mea lawe mai ka wai a me ke kinoea.
me ka TaC ole
Ma hope o ka hoʻohana ʻana iā TaC (ʻākau)
Eia kekahi, ʻo SemiceraNā huahana i uhi ʻia e TaChōʻike i kahi ola lawelawe lōʻihi a ʻoi aku ka nui o ke kūpaʻa wela kiʻekiʻe i hoʻohālikelike ʻia meʻO nā uhi SiC.Ua hōʻike ʻia nā ana Laboratory i kā mākouʻO nā pale TaChiki ke hana mau i ka wela a hiki i 2300 degere Celsius no nā manawa lōʻihi. Aia ma lalo kekahi mau laʻana o kā mākou mau laʻana:
