Pepa graphite i uhi ʻia ʻo Tantalum carbidehe mea graphite me ka ili lahilahi otantalum carbidema ka ʻili o ka substrate. Hoʻokumu ʻia ka ʻāpana lahilahi o ka tantalum carbide ma ka ʻili o ka substrate graphite e nā ʻenehana e like me ka hoʻoheheʻe kino kino (PVD) a i ʻole ka hoʻoheheʻe ʻana i ka mahu (CVD). He mau waiwai maikaʻi loa kēia uhi e like me ka paʻakikī kiʻekiʻe, ke kūpaʻa ʻana o ka ʻaʻahu maikaʻi, ka pale ʻana i ka corrosion a me ke kūpaʻa wela kiʻekiʻe.
Hāʻawi ʻo Semicera i nā ʻāpana tantalum carbide (TaC) kūikawā no nā ʻāpana like ʻole a me nā mea lawe.ʻO ke kaʻina hana hoʻopili alakaʻi Semicera e hiki ai i ka tantalum carbide (TaC) ke hoʻokō i ka maʻemaʻe kiʻekiʻe, ke kūpaʻa wela kiʻekiʻe a me ka hoʻomanawanui kiʻekiʻe, e hoʻomaikaʻi i ka maikaʻi o ka huahana o nā kristal SIC / GAN a me nā papa EPI (Kāpena ʻo TaC i uhi ʻia i ka graphite), a hoʻonui i ke ola o nā ʻāpana reactor koʻikoʻi. ʻO ka hoʻohana ʻana i ka tantalum carbide TaC coating ka mea e hoʻoponopono ai i ka pilikia lihi a hoʻomaikaʻi i ka maikaʻi o ka ulu ʻana o ke aniani, a ua hoʻopau ʻo Semicera i ka ʻenehana tantalum carbide coating (CVD), a hiki i ka pae kiʻekiʻe honua.
Ma hope o nā makahiki o ka hoʻomohala ʻana, ua lanakila ʻo Semicera i ka ʻenehana oCVD TaCme ka hooikaika pu ana o ka oihana R&D. He mea maʻalahi nā hemahema i ka ulu ʻana o nā wafers SiC, akā ma hope o ka hoʻohana ʻanaTaC, nui ka ʻokoʻa. Ma lalo iho nei ka hoʻohālikelike ʻana o nā wafers me ka TaC a me ka ʻole o TaC, a me nā ʻāpana ʻo Simicera 'no ka ulu aniani hoʻokahi.
ʻO nā pōmaikaʻi nui o ka tantalum carbide coated graphite sheet:
1. ʻO ke kūpaʻa wela kiʻekiʻe: ʻO ka Tantalum carbide he wahi hoʻoheheʻe kiʻekiʻe a maikaʻi loa ka paʻa wela kiʻekiʻe, e hana ana i ka pepa graphite i uhi ʻia i kūpono no ka hoʻohana ʻana i nā wahi wela kiʻekiʻe.
2. Ke kū'ē i ka corrosion: Hiki i ka Tantalum carbide coating ke kū'ē i ka hoʻopauʻana o nā mea kino kino a hoʻonui i ke ola o ka mea.
3. ʻO ka paʻakikī kiʻekiʻe: ʻO ka paʻakikī kiʻekiʻe o ka tantalum carbide thin layer e hāʻawi i ka pale lole maikaʻi a kūpono i nā noi e koi ana i ke kūpaʻa kiʻekiʻe.
4. Paʻa kemika: He kūpaʻa maikaʻi ka uhi ʻana o ka Tantalum carbide i ka corrosion kemika a kūpono no ka hoʻohana ʻana i kekahi mau media corrosive.
me ka TaC ole
Ma hope o ka hoʻohana ʻana iā TaC (ʻākau)
Eia kekahi, ʻo SemiceraNā huahana i uhi ʻia e TaChōʻike i kahi ola lawelawe lōʻihi a ʻoi aku ka nui o ke kūpaʻa wela kiʻekiʻe i hoʻohālikelike ʻia meʻO nā uhi SiC.Ua hōʻike ʻia nā ana Laboratory i kā mākouʻO nā pale TaChiki ke hana mau i ka wela a hiki i 2300 degere Celsius no nā manawa lōʻihi. Aia ma lalo kekahi mau laʻana o kā mākou mau laʻana:
