ʻO ka pā kākoʻo susceptor i uhi ʻia ʻo Tantalum carbidehe mea kōkua a kākoʻo paha i uhi ʻia me kahi ʻāpana lahilahi otantalum carbide. Hiki ke hana ʻia kēia uhi ma ka ʻili o ka susceptor e nā ʻenehana e like me ka hoʻoheheʻe kino kino (PVD) a i ʻole ka hoʻoheheʻe ʻana i ka mahu (CVD), hāʻawi i ka susceptor i nā waiwai maikaʻi otantalum carbide.
Hāʻawi ʻo Semicera i nā ʻāpana tantalum carbide (TaC) kūikawā no nā ʻāpana like ʻole a me nā mea lawe.ʻO ke kaʻina hana hoʻopili alakaʻi Semicera e hiki ai i ka tantalum carbide (TaC) ke hoʻokō i ka maʻemaʻe kiʻekiʻe, ke kūpaʻa wela kiʻekiʻe a me ka hoʻomanawanui kiʻekiʻe, e hoʻomaikaʻi i ka maikaʻi o ka huahana o nā kristal SIC / GAN a me nā papa EPI (Kāpena ʻo TaC i uhi ʻia i ka graphite), a hoʻonui i ke ola o nā ʻāpana reactor koʻikoʻi. ʻO ka hoʻohana ʻana i ka tantalum carbide TaC coating ka mea e hoʻoponopono ai i ka pilikia lihi a hoʻomaikaʻi i ka maikaʻi o ka ulu ʻana o ke aniani, a ua hoʻopau ʻo Semicera i ka ʻenehana tantalum carbide coating (CVD), a hiki i ka pae kiʻekiʻe honua.
Ma hope o nā makahiki o ka hoʻomohala ʻana, ua lanakila ʻo Semicera i ka ʻenehana oCVD TaCme ka hooikaika pu ana o ka oihana R&D. He mea maʻalahi nā hemahema i ka ulu ʻana o nā wafers SiC, akā ma hope o ka hoʻohana ʻanaTaC, nui ka ʻokoʻa. Ma lalo iho nei ka hoʻohālikelike ʻana o nā wafers me ka TaC a me ka ʻole o TaC, a me nā ʻāpana ʻo Simicera 'no ka ulu aniani hoʻokahi.
ʻO nā hiʻohiʻona nui o ka tantalum carbide coated base support plates e komo pū ana:
1. Paʻa wela kiʻekiʻe: ʻO ka Tantalum carbide ke kūpaʻa wela kiʻekiʻe, e hana ana i ka pā kākoʻo kumu i uhi ʻia e kūpono i nā pono kākoʻo i nā wahi hana kiʻekiʻe.
2. Ke kū'ēʻana i ke kino:ʻO ka tantalum carbide coating he maikaʻi ke kū'ēʻana i ka corrosion, hiki ke kū'ē i kaʻinoʻino a me ka oxidation, a hoʻonui i ke ola lawelawe o ke kumu.
3. ʻO ka paʻakikī kiʻekiʻe a me ke kūpaʻa ʻana: ʻO ka paʻakikī kiʻekiʻe o ka tantalum carbide coating e hāʻawi i ka papa kākoʻo kumu i ke kūpaʻa maikaʻi ʻana, i kūpono i nā manawa e koi ai i ke kūpaʻa ʻaʻahu kiʻekiʻe.
4. Paʻa kemika: Loaʻa i ka Tantalum carbide ke kūpaʻa kiʻekiʻe i nā ʻano mea kemika, e hana maikaʻi ana ka papa kākoʻo kumu i uhi ʻia i kekahi mau wahi corrosive.
me ka TaC ole
Ma hope o ka hoʻohana ʻana iā TaC (ʻākau)
Eia kekahi, ʻo SemiceraNā huahana i uhi ʻia e TaChōʻike i kahi ola lawelawe lōʻihi a ʻoi aku ka nui o ke kūpaʻa wela kiʻekiʻe i hoʻohālikelike ʻia meʻO nā uhi SiC.Ua hōʻike ʻia nā ana Laboratory i kā mākouʻO nā pale TaChiki ke hana mau i ka wela a hiki i 2300 degere Celsius no nā manawa lōʻihi. Aia ma lalo kekahi mau laʻana o kā mākou mau laʻana:
