Wafer Cassette Carrier

ʻO ka wehewehe pōkole:

Wafer Cassette Carrier- E hōʻoia i ka lawe ʻana i ka palekana a me ka maikaʻi o kāu mau wafers me Semicera's Wafer Cassette Carrier, i hoʻolālā ʻia no ka pale maikaʻi a me ka maʻalahi o ka lawelawe ʻana i ka hana semiconductor.


Huahana Huahana

Huahana Huahana

Hoʻolauna ʻo Semicera i kaWafer Cassette Carrier, he hopena koʻikoʻi no ka mālama pono ʻana i nā wafers semiconductor. Hoʻonohonoho ʻia kēia mea lawe e hoʻokō i nā koi koʻikoʻi o ka ʻoihana semiconductor, e hōʻoiaʻiʻo ana i ka pale a me ka pololei o kāu mau wafers i loko o ke kaʻina hana.

 

Nā mea nui:

ʻO ke kūkulu paʻa:ʻO kaWafer Cassette Carrierua kūkulu ʻia mai nā mea kiʻekiʻe a me nā mea paʻa e kū i ka paʻakikī o nā kaiapuni semiconductor, e hāʻawi ana i ka pale hilinaʻi mai ka ʻinoʻino a me ka pōʻino kino.

Hoʻopololei pololei:Hoʻolālā ʻia no ka hoʻonohonoho pono ʻana i ka wafer, hōʻoia kēia mea lawe i ka paʻa ʻana o nā wafers ma kahi, e hōʻemi ana i ka pilikia o ka misalignment a i ʻole ka pōʻino i ka wā o ka lawe ʻana.

Hoʻohana maʻalahi:Hoʻolālā ʻia ergonomically no ka maʻalahi o ka hoʻohana ʻana, hoʻomaʻamaʻa ka mea lawe i ka hoʻouka ʻana a me ka wehe ʻana i ke kaʻina hana, hoʻomaikaʻi i ka hana holoʻokoʻa i nā wahi lumi maʻemaʻe.

Hoʻohālikelike:Hoʻohālikelike ʻia me nā ʻano nui a me nā ʻano wafer, e hoʻolilo iā ia i mea maʻalahi no nā pono hana semiconductor.

 

E ʻike i ka pale like ʻole a me ka maʻalahi me Semicera'sWafer Cassette Carrier. Hoʻolālā ʻia kā mākou mea lawe e hoʻokō i nā kūlana kiʻekiʻe loa o ka hana semiconductor, e hōʻoiaʻiʻo ana i kāu mau wafers e noho maʻemaʻe mai ka hoʻomaka a hiki i ka pau. E hilinaʻi iā Semicera e hāʻawi i ka maikaʻi a me ka hilinaʻi āu e pono ai no kāu kaʻina hana koʻikoʻi.

Nā mea

Paahana

Ka noiʻi

Dummy

Nā Kūlana Crystal

Polytype

4H

Ua hewa ka hoʻonohonoho ʻana o ka ʻili

<11-20 >4±0.15°

Nā Kūlana Uila

Dopant

n-ʻano Nitrogen

Kū'ē

0.015-0.025ohm·cm

Nā Kūlana Mechanical

Anawaena

150.0±0.2mm

mānoanoa

350±25 μm

Kūlana pālahalaha mua

[1-100]±5°

Ka lōʻihi pālahalaha mua

47.5±1.5mm

palahalaha lua

ʻAʻohe

TTV

≤5 μm

≤10 μm

≤15 μm

LTV

≤3 μm(5mm*5mm)

≤5 μm(5mm*5mm)

≤10 μm(5mm*5mm)

Kakaka

-15μm ~ 15μm

-35μm ~ 35μm

-45μm ~ 45μm

Warp

≤35 μm

≤45 μm

≤55 μm

'Oka (AFM) mua (Si-maka)

Ra≤0.2nm (5μm*5μm)

Hoʻolālā

Micropipe mānoanoa

<1 ea/cm2

<10 ea/cm2

<15 ea/cm2

Metala haumia

≤5E10atoms/cm2

NA

BPD

≤1500 ea/cm2

≤3000 ea/cm2

NA

TSD

≤500 ea/cm2

≤1000 ea/cm2

NA

ʻAno o mua

Imua

Si

Hoʻopau ʻili

Si-maka CMP

Nā ʻāpana

≤60ea/wafer (nui≥0.3μm)

NA

Nā ʻōpala

≤5ea/mm. Ka lōʻihi huila ≤Diameter

ʻO ka lōʻihi huila≤2*Diameter

NA

ʻAlani ʻili/mau lua/ʻeleʻele/striations/ māwae/contamination

ʻAʻohe

NA

Nā ʻāpana lihi/indents/fracture/papa hex

ʻAʻohe

Nā wahi polytype

ʻAʻohe

ʻĀpana huila≤20%

ʻĀpana huila≤30%

Hōʻailona laser mua

ʻAʻohe

ʻAno o hope

Hoʻopau hope

C-maka CMP

Nā ʻōpala

≤5ea / mm, Ka lōʻihi huila≤2 * Anawaena

NA

Nā pōʻino hope (nā ʻāpana lihi/indents)

ʻAʻohe

ʻōkalakala kua

Ra≤0.2nm (5μm*5μm)

Hōʻailona laser hope

1 mm (mai ka lihi luna)

Kaulana

Kaulana

Chamfer

Hoʻopili ʻia

Hoʻopili ʻia

Epi-mākaukau me ka hoʻopaʻa ʻumeke

Puke cassette nui-wafer

*Nā memo: "NA" ʻo ia hoʻi, ʻaʻohe noi ʻO nā mea i ʻōlelo ʻole ʻia e pili ana i SEMI-STD.

tech_1_2_size
SiC wafers

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