lima lima lima waferhe mea hana nui i hoʻohana ʻia i ke kaʻina hana semiconductor e mālama, hoʻoili a hoʻonohonohowafers. ʻO ka mea maʻamau ka lima robotic, kahi gripper a me kahi ʻōnaehana mana, me ka neʻe pololei a me ka hiki ke hoʻonohonoho.Wafer lima limaHoʻohana nui ʻia i nā loulou like ʻole i ka hana semiconductor, me nā kaʻina hana e like me ka hoʻouka ʻana i ka wafer, hoʻomaʻemaʻe, hoʻopaʻa kiʻi ʻoniʻoni lahilahi, etching, lithography a me ka nānā ʻana. ʻO kona pololei, hilinaʻi a me nā mana automation he mea nui ia e hōʻoia i ka maikaʻi, kūpono a me ke kūlike o ke kaʻina hana.
ʻO nā hana nui o ka lima lima wafer:
1. Hoʻololi Wafer: Hiki i ka lima hoʻohana wafer ke hoʻololi pololei i nā wafers mai kahi wahi a i kekahi, e like me ka lawe ʻana i nā wafers mai kahi pahu mālama a waiho i loko o kahi mea hana.
2. Ke hoʻonohonoho a me ka hoʻonohonoho ʻana: Hiki i ka lima lima wafer ke hoʻonohonoho pono a hoʻonohonoho pono i ka wafer e hōʻoia i ka alignment pololei a me ke kūlana no ka hana ʻana a i ʻole nā hana ana.
3. Hoʻopaʻa a hoʻokuʻu: Hoʻolako pinepine ʻia nā lima lima Wafer me nā grippers hiki ke hoʻopaʻa palekana i nā wafers a hoʻokuʻu iā lākou i ka wā e pono ai e hōʻoia i ka hoʻoili ʻana a me ka mālama ʻana i nā wafers.
4. Ka mana 'akomi: Ho'olako 'ia ka lima lima wafer me ka 'ōnaehana ho'omalu holomua e hiki ke ho'okō 'akomi i nā ka'ina hana i koho mua 'ia, ho'omaika'i i ka hana 'ana a ho'emi i nā hewa kanaka.
Nā hiʻohiʻona a me nā pono
1.Pcise ana a me ka thermal paʻa.
2.High kiko'ī stiffness a me ka maikaʻi loa thermal uniformity, lōʻihi-manawa hoʻohana 'aʻole maʻalahi e kulou deformation.
3. He ʻili maʻemaʻe kona a me ke kūpaʻa maikaʻi ʻana, pēlā e mālama pono ai i ka chip me ka ʻole o ka palaka.
4.Silicon carbide resistivity ma 106-108Ω, non-magnetic, ma ka laina me nā koi kiko'ī anti-ESD; Hiki iā ia ke pale i ka hōʻiliʻili ʻana o ka uila static ma ka ʻili o ka chip.
5.Good thermal conductivity, haʻahaʻa hoʻonui coefficient.
