ʻO Silicon Carbide ka waʻa wafer kapuahi kapuaʻi kapuahi

Silicon Carbide horizontal-chamber umu wafer waʻa Hōʻikeʻike kiʻi

ʻO ka wehewehe pōkole:

Hāʻawi ʻo Semicera i nā waʻa wafer, mea paa, a me nā mea lawe wafer maʻamau no ka hoʻonohonoho kū pololei/koe a me ka pae.Hāʻawi nā seramika kiʻekiʻe i ka pale wela maikaʻi a me ka lōʻihi o ka plasma, ʻoiai e hōʻemi ana i nā ʻāpana a me nā mea haumia.Hāʻawi pū ka Semiconductor grade silicon carbide (SiC) i ka ikaika wela kiʻekiʻe no nā mea lawe wafer kiʻekiʻe.

E hoʻouna i ka leka uila iā mākou

Huahana Huahana

ʻO kā mākou LPCVD(Ka Haʻahaʻa-Pression Chemical Vapor Deposition)Waapa Silicon Carbideua hana ʻia me ka ʻenehana ʻokiʻoki, i hoʻolālā ʻia no ke kaʻina hana semiconductor wela kiʻekiʻe.ʻO kēia kūlana kiʻekiʻewaapa kalapona silikahāʻawi i ka hana kūikawā a me ka hilinaʻi ma lalo o nā kūlana koʻikoʻi, e lilo ia i koho kūpono no ka hana semiconductor a me nā kaʻina hana wela kiʻekiʻe.

Nā mea nui

Paʻa-Mahana Kiʻekiʻe:ʻO kā mākouwaapa kalapona silikakū i ka mahana a hiki i1700°C, e hōʻoia ana i ka paʻa a me ka hana ʻana i nā hana wela kiʻekiʻe mau.

Kemikini inertness:Me ke kūpaʻa kemika koʻikoʻi, pale ʻo ia i ka corrosion mai nā waikawa, nā kumu, a me nā kemika corrosive ʻē aʻe, e hōʻoiaʻiʻo ana i ka lōʻihi o ka hoʻohana lōʻihi.

ʻOi aku ka maikaʻi o ka wela wela:ʻO ka hoʻoili wela wela kiʻekiʻe e hōʻoia i ka hāʻawi like ʻana o ka mahana i loko o ka moku, e hāʻawi ana i ka hoʻomaikaʻi ʻana i ka maikaʻi o ka huahana a me ke kūlike.

Ka ikaika a me ka pale ʻana i ka lole:ʻO ka ikaika mechanical maikaʻi a me ke kūpaʻa ʻaʻahu e ʻae i ka hoʻohana mau ʻana me ka ʻole o ka pōʻino, e hōʻemi ana i ke alapine hoʻololi a me ke kumukūʻai.

Nā noi:

He kūpono no nā kaʻina hana wela kiʻekiʻe, ʻo ia hoʻi akā ʻaʻole i kaupalena ʻia i ka hana semiconductor, ka hana ʻana o nā cell solar, a me nā hana umu wela wela.ʻO kāna hana kiʻekiʻe a me ka hilinaʻi e lilo ia i koho kūpono no kēia mau noi koi.

No ke aha e koho aiʻO kā mākou LPCVDWaapa Silicon Carbide?

Kūpaʻa mākou i ka hāʻawi ʻana i nā kūlana kiʻekiʻe o nā huahana a me nā lawelawe.ʻO kā mākou LPCVDWaapa Silicon Carbideʻaʻole wale ka hāʻawi ʻana i ka hana koʻikoʻi a me ka lōʻihi akā kōkua pū kekahi i ka hoʻonui ʻana i ka pono hana a me ka maikaʻi, e hōʻemi ana i nā kumukūʻai hana.ʻO ke koho ʻana iā mākou ʻo ia ke koho ʻana i kahi hoa hilinaʻi e hoʻoikaika i kāu ʻoihana i mua.