Silicon carbide wafer kaʻina hana

Wafer kalapona silikahana ʻia me ka pauka silika maʻemaʻe kiʻekiʻe a me ka pauka kalapona maʻemaʻe kiʻekiʻe e like me nā mea maka, a ua ulu ʻia ke aniani carbide silika e ke ʻano hoʻoili kino kino (PVT), a hana ʻia i lokowafer silika carbide.

① Hoʻohui ʻia nā mea maka.Ua hui pū ʻia ka pauka silika maʻemaʻe kiʻekiʻe a me ka pauka kalapona maʻemaʻe kiʻekiʻe e like me kekahi ratio, a ua hoʻohui ʻia nā ʻāpana silicon carbide i ka wela kiʻekiʻe ma luna o 2,000 ℃.Ma hope o ka ʻoki ʻana, hoʻomaʻemaʻe a me nā kaʻina hana ʻē aʻe, hoʻomākaukau ʻia ke kiʻekiʻe kiʻekiʻe o ka silicon carbide pauka maka i kūpono i nā koi o ka ulu kristal.

② Ka ulu ʻana o ke aniani.Me ka hoʻohana ʻana i ka pauka SIC maʻemaʻe kiʻekiʻe ma ke ʻano he mea maka, ua ulu ʻia ke aniani ma ke ʻano o ka hoʻoili kino kino (PVT) me ka hoʻohana ʻana i ka umu ulu kristal i kūkulu ʻia.

③ ka hana ʻana.Ua ho'onohonoho 'ia ka silicon carbide crystal ingot e ka X-ray single crystal orientator, a laila lepo a'ōwili'ia, a hana 'ia i loko o ke anawaena silicon carbide kristal.

④ ʻOki Crystal.Me ka hoʻohana ʻana i nā mea ʻoki laina nui, ʻoki ʻia nā kristal carbide silicon i loko o nā ʻāpana lahilahi me ka mānoanoa ʻaʻole ʻoi aku ma mua o 1mm.

⑤ Ka wili puʻupuʻu.Hoʻopili ʻia ka wafer a hiki i ka palahalaha a me ka ʻalaʻala i makemake ʻia e nā wai wili daimana o nā ʻāpana like ʻole.

⑥ Hoʻomaʻamaʻa chip.Ua loaʻa mai ka carbide silicon i poni ʻia me ka ʻole o ka pōʻino o ka ʻili ma o ka polishing mechanical a me ka polishing chemical.

⑦ ʻO ka ʻike chip.E hoʻohana i ka microscope optical, X-ray diffractometer, atomic force microscope, non-contact resistivity tester, surface flatness tester, surface defect comprehensive tester and other instruments and equipment to find the microtubule density, crystal quality, surface roughness, resistivity, warpage, curvature, hoʻololi mānoanoa, ʻili ʻili a me nā ʻāpana ʻē aʻe o ka wafer silika carbide.Wahi a kēia, hoʻoholo ʻia ka pae maikaʻi o ka chip.

⑧ Hoʻomaʻemaʻe chip.Hoʻomaʻemaʻe ʻia ka silicon carbide polishing sheet me ka mea hoʻomaʻemaʻe a me ka wai maʻemaʻe e hoʻoneʻe i ke koena o ka wai polishing a me nā lepo ʻē aʻe ma luna o ka pepa polishing, a laila puhi ʻia ka wafer a lulu maloʻo e ka ultra-high purity nitrogen a me ka mīkini maloʻo;Hoʻopili ʻia ka wafer i loko o kahi pahu pepa maʻemaʻe i loko o kahi keʻena super-maʻemaʻe e hana i kahi wafer silicon carbide i hoʻomākaukau ʻia i lalo.

ʻO ka nui o ka nui o ka chip, ʻoi aku ka paʻakikī o ka ulu ʻana o ka kristal e pili ana a me ka ʻenehana hana, a ʻoi aku ka kiʻekiʻe o ka hana ʻana o nā ʻaoʻao o lalo, ʻo ia ka haʻahaʻa o ke kumukūʻai.